JPS6437687U - - Google Patents
Info
- Publication number
- JPS6437687U JPS6437687U JP13098187U JP13098187U JPS6437687U JP S6437687 U JPS6437687 U JP S6437687U JP 13098187 U JP13098187 U JP 13098187U JP 13098187 U JP13098187 U JP 13098187U JP S6437687 U JPS6437687 U JP S6437687U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- optical fiber
- counting device
- electronic counting
- electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 239000013307 optical fiber Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 239000000835 fiber Substances 0.000 description 1
Description
第１図は本考案の一実施例を示した説明図、第
２，３図は本考案の他の実施例を示した説明図、
第４図は従来例を示した説明図である。
１：試料、２：電子検出部、３：検出窓、９：
光フアイバー、１０：被覆、１１：フアイバー芯
線、１２：外カバー、１３：検出部本体、１４：
中心導体、１５：絶縁チユーブ、１６：外部導体
、１８，２０：絶縁筒部材、１９：ネジ部、２１
：ネジ穴、２２：カソード電極、２３：第１のグ
リツド電極、２４：トツプカバー、２５：第２の
グリツド電極、２６：金属シールド。
Fig. 1 is an explanatory diagram showing one embodiment of the present invention, Figs. 2 and 3 are explanatory diagrams showing other embodiments of the present invention,
FIG. 4 is an explanatory diagram showing a conventional example. 1: Sample, 2: Electron detection section, 3: Detection window, 9:
Optical fiber, 10: Covering, 11: Fiber core wire, 12: Outer cover, 13: Detection unit main body, 14:
Center conductor, 15: Insulating tube, 16: Outer conductor, 18, 20: Insulating cylindrical member, 19: Threaded portion, 21
: screw hole, 22: cathode electrode, 23: first grid electrode, 24: top cover, 25: second grid electrode, 26: metal shield.
Claims (1)
に照射し、該試料から放出される電子を電子検出
部内に導入して電子の数を計数する電子計数装置
に於いて、 前記光フアイバーの先端外周に金属シールドを
施して接地接続したことを特徴とする電子計数装
置。[Claims for Utility Model Registration] An electronic counting device that counts the number of electrons by guiding light from a light source through an optical fiber onto a sample and introducing electrons emitted from the sample into an electron detection section. . An electronic counting device, characterized in that the outer circumference of the tip of the optical fiber is provided with a metal shield and connected to ground.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (en) | 1987-08-28 | 1987-08-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13098187U JPH0526484Y2 (en) | 1987-08-28 | 1987-08-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6437687U true JPS6437687U (en) | 1989-03-07 |
| JPH0526484Y2 JPH0526484Y2 (en) | 1993-07-05 |
Family
ID=31386630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13098187U Expired - Lifetime JPH0526484Y2 (en) | 1987-08-28 | 1987-08-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526484Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013129209A1 (en) * | 2012-03-01 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
-
1987
- 1987-08-28 JP JP13098187U patent/JPH0526484Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013129209A1 (en) * | 2012-03-01 | 2013-09-06 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
| JP2013182760A (en) * | 2012-03-01 | 2013-09-12 | Hitachi High-Technologies Corp | Charged particle beam device |
| US9330883B2 (en) | 2012-03-01 | 2016-05-03 | Hitachi High-Technologies Corporation | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526484Y2 (en) | 1993-07-05 |
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