JPS6437465U - - Google Patents

Info

Publication number
JPS6437465U
JPS6437465U JP13377887U JP13377887U JPS6437465U JP S6437465 U JPS6437465 U JP S6437465U JP 13377887 U JP13377887 U JP 13377887U JP 13377887 U JP13377887 U JP 13377887U JP S6437465 U JPS6437465 U JP S6437465U
Authority
JP
Japan
Prior art keywords
substrate
glow discharge
film
aluminum
mask body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13377887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13377887U priority Critical patent/JPH0543095Y2/ja
Publication of JPS6437465U publication Critical patent/JPS6437465U/ja
Application granted granted Critical
Publication of JPH0543095Y2 publication Critical patent/JPH0543095Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP13377887U 1987-08-31 1987-08-31 Expired - Lifetime JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13377887U JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-31 1987-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13377887U JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-31 1987-08-31

Publications (2)

Publication Number Publication Date
JPS6437465U true JPS6437465U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-07
JPH0543095Y2 JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-29

Family

ID=31391955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13377887U Expired - Lifetime JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-08-31 1987-08-31

Country Status (1)

Country Link
JP (1) JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPH0543095Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-10-29

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