JPS6435759U - - Google Patents

Info

Publication number

JPS6435759U

JPS6435759U JP13060187U JP13060187U JPS6435759U JP S6435759 U JPS6435759 U JP S6435759U JP 13060187 U JP13060187 U JP 13060187U JP 13060187 U JP13060187 U JP 13060187U JP S6435759 U JPS6435759 U JP S6435759U

Authority

JP

Japan

Prior art keywords

type semiconductor

conductive layer

conductive

insulating film

layer

Prior art date

1987-08-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010410 layer Substances 0.000 claims description 22
• 239000004065 semiconductor Substances 0.000 claims description 14
• 239000011229 interlayer Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 description 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1