JPS6435748U - - Google Patents

Info

Publication number
JPS6435748U
JPS6435748U JP13012887U JP13012887U JPS6435748U JP S6435748 U JPS6435748 U JP S6435748U JP 13012887 U JP13012887 U JP 13012887U JP 13012887 U JP13012887 U JP 13012887U JP S6435748 U JPS6435748 U JP S6435748U
Authority
JP
Japan
Prior art keywords
carrier
chuck
supports
transporting
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13012887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13012887U priority Critical patent/JPS6435748U/ja
Publication of JPS6435748U publication Critical patent/JPS6435748U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
JP13012887U 1987-08-28 1987-08-28 Pending JPS6435748U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13012887U JPS6435748U (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13012887U JPS6435748U (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Publications (1)

Publication Number Publication Date
JPS6435748U true JPS6435748U (enrdf_load_stackoverflow) 1989-03-03

Family

ID=31385016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13012887U Pending JPS6435748U (enrdf_load_stackoverflow) 1987-08-28 1987-08-28

Country Status (1)

Country Link
JP (1) JPS6435748U (enrdf_load_stackoverflow)

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