JPS6435655U - - Google Patents

Info

Publication number
JPS6435655U
JPS6435655U JP13080887U JP13080887U JPS6435655U JP S6435655 U JPS6435655 U JP S6435655U JP 13080887 U JP13080887 U JP 13080887U JP 13080887 U JP13080887 U JP 13080887U JP S6435655 U JPS6435655 U JP S6435655U
Authority
JP
Japan
Prior art keywords
gate valve
high vacuum
sample chamber
pressure
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13080887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13080887U priority Critical patent/JPS6435655U/ja
Publication of JPS6435655U publication Critical patent/JPS6435655U/ja
Pending legal-status Critical Current

Links

JP13080887U 1987-08-27 1987-08-27 Pending JPS6435655U (US08124630-20120228-C00102.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13080887U JPS6435655U (US08124630-20120228-C00102.png) 1987-08-27 1987-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13080887U JPS6435655U (US08124630-20120228-C00102.png) 1987-08-27 1987-08-27

Publications (1)

Publication Number Publication Date
JPS6435655U true JPS6435655U (US08124630-20120228-C00102.png) 1989-03-03

Family

ID=31386306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13080887U Pending JPS6435655U (US08124630-20120228-C00102.png) 1987-08-27 1987-08-27

Country Status (1)

Country Link
JP (1) JPS6435655U (US08124630-20120228-C00102.png)

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