JPS6433566U - - Google Patents
Info
- Publication number
- JPS6433566U JPS6433566U JP12686487U JP12686487U JPS6433566U JP S6433566 U JPS6433566 U JP S6433566U JP 12686487 U JP12686487 U JP 12686487U JP 12686487 U JP12686487 U JP 12686487U JP S6433566 U JPS6433566 U JP S6433566U
- Authority
- JP
- Japan
- Prior art keywords
- butterfly valve
- flow rate
- pressure regulating
- regulating device
- rate control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (OSRAM) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (OSRAM) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433566U true JPS6433566U (OSRAM) | 1989-03-01 |
Family
ID=31378771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12686487U Pending JPS6433566U (OSRAM) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433566U (OSRAM) |
-
1987
- 1987-08-19 JP JP12686487U patent/JPS6433566U/ja active Pending
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