JPS64330U - - Google Patents

Info

Publication number
JPS64330U
JPS64330U JP9346887U JP9346887U JPS64330U JP S64330 U JPS64330 U JP S64330U JP 9346887 U JP9346887 U JP 9346887U JP 9346887 U JP9346887 U JP 9346887U JP S64330 U JPS64330 U JP S64330U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
predetermined regions
etching apparatus
electrolytic etching
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9346887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0514509Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9346887U priority Critical patent/JPH0514509Y2/ja
Publication of JPS64330U publication Critical patent/JPS64330U/ja
Application granted granted Critical
Publication of JPH0514509Y2 publication Critical patent/JPH0514509Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP9346887U 1987-06-19 1987-06-19 Expired - Lifetime JPH0514509Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9346887U JPH0514509Y2 (enrdf_load_stackoverflow) 1987-06-19 1987-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9346887U JPH0514509Y2 (enrdf_load_stackoverflow) 1987-06-19 1987-06-19

Publications (2)

Publication Number Publication Date
JPS64330U true JPS64330U (enrdf_load_stackoverflow) 1989-01-05
JPH0514509Y2 JPH0514509Y2 (enrdf_load_stackoverflow) 1993-04-19

Family

ID=30956072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9346887U Expired - Lifetime JPH0514509Y2 (enrdf_load_stackoverflow) 1987-06-19 1987-06-19

Country Status (1)

Country Link
JP (1) JPH0514509Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0514509Y2 (enrdf_load_stackoverflow) 1993-04-19

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