JPS63162539U - - Google Patents

Info

Publication number
JPS63162539U
JPS63162539U JP5514387U JP5514387U JPS63162539U JP S63162539 U JPS63162539 U JP S63162539U JP 5514387 U JP5514387 U JP 5514387U JP 5514387 U JP5514387 U JP 5514387U JP S63162539 U JPS63162539 U JP S63162539U
Authority
JP
Japan
Prior art keywords
plating liquid
liquid tank
side electrode
semiconductor wafer
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5514387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5514387U priority Critical patent/JPS63162539U/ja
Publication of JPS63162539U publication Critical patent/JPS63162539U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
JP5514387U 1987-04-10 1987-04-10 Pending JPS63162539U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5514387U JPS63162539U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5514387U JPS63162539U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162539U true JPS63162539U (enrdf_load_stackoverflow) 1988-10-24

Family

ID=30882780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5514387U Pending JPS63162539U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162539U (enrdf_load_stackoverflow)

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