JPS6430691U - - Google Patents
Info
- Publication number
- JPS6430691U JPS6430691U JP12447587U JP12447587U JPS6430691U JP S6430691 U JPS6430691 U JP S6430691U JP 12447587 U JP12447587 U JP 12447587U JP 12447587 U JP12447587 U JP 12447587U JP S6430691 U JPS6430691 U JP S6430691U
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- adsorption layer
- heat generating
- layer
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 6
- 230000008531 maintenance mechanism Effects 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987124475U JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987124475U JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430691U true JPS6430691U (US06346242-20020212-C00066.png) | 1989-02-27 |
| JPH0436236Y2 JPH0436236Y2 (US06346242-20020212-C00066.png) | 1992-08-26 |
Family
ID=31374239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987124475U Expired JPH0436236Y2 (US06346242-20020212-C00066.png) | 1987-08-14 | 1987-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0436236Y2 (US06346242-20020212-C00066.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7472651B2 (en) | 2002-12-27 | 2009-01-06 | Mitsubishi Heavy Industries, Ltd. | Waste liquid regenerator of printing machine |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54163118A (en) * | 1978-06-15 | 1979-12-25 | Matsushita Electric Ind Co Ltd | Drafting board |
-
1987
- 1987-08-14 JP JP1987124475U patent/JPH0436236Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54163118A (en) * | 1978-06-15 | 1979-12-25 | Matsushita Electric Ind Co Ltd | Drafting board |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7472651B2 (en) | 2002-12-27 | 2009-01-06 | Mitsubishi Heavy Industries, Ltd. | Waste liquid regenerator of printing machine |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436236Y2 (US06346242-20020212-C00066.png) | 1992-08-26 |
