JPS6430403U - - Google Patents
Info
- Publication number
- JPS6430403U JPS6430403U JP9907388U JP9907388U JPS6430403U JP S6430403 U JPS6430403 U JP S6430403U JP 9907388 U JP9907388 U JP 9907388U JP 9907388 U JP9907388 U JP 9907388U JP S6430403 U JPS6430403 U JP S6430403U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- optical
- optical path
- condensing
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 239000010408 film Substances 0.000 claims description 7
- 238000012806 monitoring device Methods 0.000 claims description 6
- 239000012788 optical film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 11
- 238000010586 diagram Methods 0.000 description 8
- 238000012544 monitoring process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9907388U JPS6430403U (enExample) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9907388U JPS6430403U (enExample) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6430403U true JPS6430403U (enExample) | 1989-02-23 |
Family
ID=31325897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9907388U Pending JPS6430403U (enExample) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6430403U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5489680A (en) * | 1977-12-26 | 1979-07-16 | Matsushita Electric Ind Co Ltd | Optical measuring method and optical measuring apparatus |
-
1988
- 1988-07-28 JP JP9907388U patent/JPS6430403U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5489680A (en) * | 1977-12-26 | 1979-07-16 | Matsushita Electric Ind Co Ltd | Optical measuring method and optical measuring apparatus |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0496891A4 (en) | Method and device for optical exposure | |
| GR3025903T3 (en) | Dichroic mirror and projector having the same | |
| JPS6430403U (enExample) | ||
| JPS644102Y2 (enExample) | ||
| JPS62146130U (enExample) | ||
| JPH0535364Y2 (enExample) | ||
| JPS5869817U (ja) | 光学装置 | |
| JPH0455318Y2 (enExample) | ||
| JPS5948604A (ja) | 光学膜形成装置における膜厚監視装置 | |
| JPH0178938U (enExample) | ||
| JPH0389433U (enExample) | ||
| JPH0442831Y2 (enExample) | ||
| JPH0444375A (ja) | レーザ共振器のアライメント装置 | |
| JPH0227109U (enExample) | ||
| JPS6134117U (ja) | 距離検出装置における投光光学系 | |
| JPH0397293U (enExample) | ||
| JPS63155055U (enExample) | ||
| JPH0252428U (enExample) | ||
| JPH02148406U (enExample) | ||
| JPS6434617U (enExample) | ||
| JPH0277609U (enExample) | ||
| JPS6163391U (enExample) | ||
| JPS6163390U (enExample) | ||
| JPH0261756U (enExample) | ||
| JPS59197007A (ja) | レ−ザ光により投光線を得る装置 |