JPS6430366U - - Google Patents
Info
- Publication number
- JPS6430366U JPS6430366U JP12247387U JP12247387U JPS6430366U JP S6430366 U JPS6430366 U JP S6430366U JP 12247387 U JP12247387 U JP 12247387U JP 12247387 U JP12247387 U JP 12247387U JP S6430366 U JPS6430366 U JP S6430366U
- Authority
- JP
- Japan
- Prior art keywords
- graphite crucible
- silicon single
- single crystals
- pulling silicon
- sealing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 239000003566 sealing material Substances 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000007789 sealing Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は黒鉛るつぼの斜視図、第２図ａは本考
案の一例の黒鉛るつぼの合せ目内側面Ｒ部にシー
ル材の当て板を設けた状態の説明図、第２図ｂは
第２図ａの黒鉛るつぼ分割部分の右側の側面図、
第３図ａは本考案の他の例の黒鉛るつぼの斜視図
、第３図ｂは第３図ａの黒鉛るつぼの分割部分の
右側の側面図、第３図ｃは第３図ｂのＡ部の拡大
図である。
１……黒鉛るつぼ、２……分割部分の合せ目、
３……シール材の当て板、４……当て板埋込み溝
、５……シール材、６……シール材の埋込み溝。
Fig. 1 is a perspective view of a graphite crucible, Fig. 2a is an explanatory view of a graphite crucible according to an example of the present invention, with a sealing plate provided on the inner surface R of the seam, and Fig. 2b is an explanatory view of a graphite crucible according to an example of the present invention. A side view of the right side of the divided part of the graphite crucible in Figure a,
Figure 3a is a perspective view of a graphite crucible according to another example of the present invention, Figure 3b is a side view of the right side of the divided part of the graphite crucible in Figure 3a, and Figure 3c is A in Figure 3b. FIG. 1...graphite crucible, 2...joint of divided parts,
3...Packing plate for sealing material, 4...Groove for embedding sealing plate, 5...Sealing material, 6...Groove for embedding sealing material.
Claims (1)
を包囲し保護する分割可能な黒鉛るつぼにおいて
、該黒鉛るつぼ分割部分の合せ目の少くとも一部
分をシール材で封止したことを特徴とするシリコ
ン単結晶引上げ用黒鉛るつぼ。 A method for pulling silicon single crystals, characterized in that, in a splittable graphite crucible that surrounds and protects the outside of a quartz crucible body for pulling silicon single crystals, at least a portion of the seam of the divided parts of the graphite crucible is sealed with a sealing material. graphite crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12247387U JPH0519338Y2 (en) | 1987-08-12 | 1987-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12247387U JPH0519338Y2 (en) | 1987-08-12 | 1987-08-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6430366U true JPS6430366U (en) | 1989-02-23 |
| JPH0519338Y2 JPH0519338Y2 (en) | 1993-05-21 |
Family
ID=31370439
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12247387U Expired - Lifetime JPH0519338Y2 (en) | 1987-08-12 | 1987-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519338Y2 (en) |
-
1987
- 1987-08-12 JP JP12247387U patent/JPH0519338Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0519338Y2 (en) | 1993-05-21 |