JPS6430356U - - Google Patents

Info

Publication number
JPS6430356U
JPS6430356U JP12288087U JP12288087U JPS6430356U JP S6430356 U JPS6430356 U JP S6430356U JP 12288087 U JP12288087 U JP 12288087U JP 12288087 U JP12288087 U JP 12288087U JP S6430356 U JPS6430356 U JP S6430356U
Authority
JP
Japan
Prior art keywords
pipe
vapor deposition
chemical vapor
deposition apparatus
adhesion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12288087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0444614Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12288087U priority Critical patent/JPH0444614Y2/ja
Publication of JPS6430356U publication Critical patent/JPS6430356U/ja
Application granted granted Critical
Publication of JPH0444614Y2 publication Critical patent/JPH0444614Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP12288087U 1987-08-11 1987-08-11 Expired JPH0444614Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12288087U JPH0444614Y2 (enrdf_load_stackoverflow) 1987-08-11 1987-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12288087U JPH0444614Y2 (enrdf_load_stackoverflow) 1987-08-11 1987-08-11

Publications (2)

Publication Number Publication Date
JPS6430356U true JPS6430356U (enrdf_load_stackoverflow) 1989-02-23
JPH0444614Y2 JPH0444614Y2 (enrdf_load_stackoverflow) 1992-10-21

Family

ID=31371223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12288087U Expired JPH0444614Y2 (enrdf_load_stackoverflow) 1987-08-11 1987-08-11

Country Status (1)

Country Link
JP (1) JPH0444614Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0444614Y2 (enrdf_load_stackoverflow) 1992-10-21

Similar Documents

Publication Publication Date Title
JPS6430356U (enrdf_load_stackoverflow)
JPH02131640U (enrdf_load_stackoverflow)
JPS61147274U (enrdf_load_stackoverflow)
JPS62145325U (enrdf_load_stackoverflow)
JPS6233147U (enrdf_load_stackoverflow)
JPH02145618U (enrdf_load_stackoverflow)
JPH01173593U (enrdf_load_stackoverflow)
JPH0180601U (enrdf_load_stackoverflow)
JPS6386496U (enrdf_load_stackoverflow)
JPS6255537U (enrdf_load_stackoverflow)
JPS63115064U (enrdf_load_stackoverflow)
JPH01100985U (enrdf_load_stackoverflow)
JPS63200403U (enrdf_load_stackoverflow)
JPH0323292U (enrdf_load_stackoverflow)
JPS63164687U (enrdf_load_stackoverflow)
JPS61150844U (enrdf_load_stackoverflow)
JPS6162223U (enrdf_load_stackoverflow)
JPS62100388U (enrdf_load_stackoverflow)
JPS62143891U (enrdf_load_stackoverflow)
JPH02131639U (enrdf_load_stackoverflow)
JPS62178341U (enrdf_load_stackoverflow)
JPS62183985U (enrdf_load_stackoverflow)
JPS63165843U (enrdf_load_stackoverflow)
JPS6449789U (enrdf_load_stackoverflow)
JPS61126026U (enrdf_load_stackoverflow)