JPS62145325U - - Google Patents

Info

Publication number
JPS62145325U
JPS62145325U JP3208386U JP3208386U JPS62145325U JP S62145325 U JPS62145325 U JP S62145325U JP 3208386 U JP3208386 U JP 3208386U JP 3208386 U JP3208386 U JP 3208386U JP S62145325 U JPS62145325 U JP S62145325U
Authority
JP
Japan
Prior art keywords
side end
reaction chamber
exhaust side
exhaust
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3208386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH087625Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3208386U priority Critical patent/JPH087625Y2/ja
Publication of JPS62145325U publication Critical patent/JPS62145325U/ja
Application granted granted Critical
Publication of JPH087625Y2 publication Critical patent/JPH087625Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP3208386U 1986-03-05 1986-03-05 減圧ｃｖｄ装置 Expired - Lifetime JPH087625Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3208386U JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3208386U JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS62145325U true JPS62145325U (enrdf_load_stackoverflow) 1987-09-12
JPH087625Y2 JPH087625Y2 (ja) 1996-03-04

Family

ID=30838413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3208386U Expired - Lifetime JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH087625Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102831334B1 (ko) * 2022-12-29 2025-07-07 고려대학교 산학협력단 모듈 교체형 챔버

Also Published As

Publication number Publication date
JPH087625Y2 (ja) 1996-03-04

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