JPS6429833U - - Google Patents

Info

Publication number
JPS6429833U
JPS6429833U JP12504287U JP12504287U JPS6429833U JP S6429833 U JPS6429833 U JP S6429833U JP 12504287 U JP12504287 U JP 12504287U JP 12504287 U JP12504287 U JP 12504287U JP S6429833 U JPS6429833 U JP S6429833U
Authority
JP
Japan
Prior art keywords
probe card
card
probe
chuck
mount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12504287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12504287U priority Critical patent/JPS6429833U/ja
Publication of JPS6429833U publication Critical patent/JPS6429833U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12504287U 1987-08-17 1987-08-17 Pending JPS6429833U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12504287U JPS6429833U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12504287U JPS6429833U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Publications (1)

Publication Number Publication Date
JPS6429833U true JPS6429833U (enrdf_load_stackoverflow) 1989-02-22

Family

ID=31375295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12504287U Pending JPS6429833U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Country Status (1)

Country Link
JP (1) JPS6429833U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645416A (ja) * 1991-08-13 1994-02-18 Tokyo Electron Ltd ウエハプローバ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645416A (ja) * 1991-08-13 1994-02-18 Tokyo Electron Ltd ウエハプローバ

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