JPS6429832U - - Google Patents

Info

Publication number
JPS6429832U
JPS6429832U JP12504187U JP12504187U JPS6429832U JP S6429832 U JPS6429832 U JP S6429832U JP 12504187 U JP12504187 U JP 12504187U JP 12504187 U JP12504187 U JP 12504187U JP S6429832 U JPS6429832 U JP S6429832U
Authority
JP
Japan
Prior art keywords
slide shaft
probe card
diameter gear
small
backward
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12504187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12504187U priority Critical patent/JPS6429832U/ja
Publication of JPS6429832U publication Critical patent/JPS6429832U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP12504187U 1987-08-17 1987-08-17 Pending JPS6429832U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12504187U JPS6429832U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12504187U JPS6429832U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Publications (1)

Publication Number Publication Date
JPS6429832U true JPS6429832U (enrdf_load_stackoverflow) 1989-02-22

Family

ID=31375293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12504187U Pending JPS6429832U (enrdf_load_stackoverflow) 1987-08-17 1987-08-17

Country Status (1)

Country Link
JP (1) JPS6429832U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04355943A (ja) * 1991-08-13 1992-12-09 Tokyo Electron Ltd ウエハプローバ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04355943A (ja) * 1991-08-13 1992-12-09 Tokyo Electron Ltd ウエハプローバ

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