JPS6427853A - Polishing device - Google Patents

Polishing device

Info

Publication number
JPS6427853A
JPS6427853A JP62179928A JP17992887A JPS6427853A JP S6427853 A JPS6427853 A JP S6427853A JP 62179928 A JP62179928 A JP 62179928A JP 17992887 A JP17992887 A JP 17992887A JP S6427853 A JPS6427853 A JP S6427853A
Authority
JP
Japan
Prior art keywords
vibration
surface plate
specimen
rotated
enabling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62179928A
Other languages
Japanese (ja)
Other versions
JPH057148B2 (en
Inventor
Toshiro Doi
Junji Watanabe
Yoshiyuki Ishikawa
Susumu Sakano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP62179928A priority Critical patent/JPS6427853A/en
Publication of JPS6427853A publication Critical patent/JPS6427853A/en
Publication of JPH057148B2 publication Critical patent/JPH057148B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To enable super fine finish by constituting a device to be composed of a force couple type drive machine section providing uniform acting force to a rotating shaft, an oil dynamic pressure bearing mechanism section restraining deviation and vibration, and of a plurality of guide rollers on a tool surface plate. CONSTITUTION:When a surface plate 15 is rotated with a motor driven, a ring 18 is driven so as to be rotated, enabling abrasives dropped on the surface plate 15 to enter into a facing space between a specimen and the surface plate 15, and the specimen is thereby polished. In this case, the main shaft 10 will never be tilted because a pulley 25 is rotated by a driving system in a force couple form. Bearings 22 and 23 and guide rollers 16 and 16' forms a film of oil on the rotation contacting surface, vibration transferred to the aforesaid section is absorbed hereby so as to prevent the propagation thereof to other portions for enabling therefore the vibration of a whole device to be reduced. This constitution consequently enables both the surface vibration and the vibration of the surface plate 15 to be completely eliminated, thereby enabling super fine finish to be performed with no irregular disturbance given to the surface of the specimen.
JP62179928A 1987-07-21 1987-07-21 Polishing device Granted JPS6427853A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62179928A JPS6427853A (en) 1987-07-21 1987-07-21 Polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62179928A JPS6427853A (en) 1987-07-21 1987-07-21 Polishing device

Publications (2)

Publication Number Publication Date
JPS6427853A true JPS6427853A (en) 1989-01-30
JPH057148B2 JPH057148B2 (en) 1993-01-28

Family

ID=16074377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62179928A Granted JPS6427853A (en) 1987-07-21 1987-07-21 Polishing device

Country Status (1)

Country Link
JP (1) JPS6427853A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989420A (en) * 1994-12-27 1999-11-23 Yuugengaisya Mikazuki Bunkakaikan Porous ceramic filter, method of manufacturing the same, ceramic filter manufacturing extrusion molding die and extrusion molding apparatus using the die

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016363A (en) * 1983-07-05 1985-01-28 Koei Sangyo Kk Method and mechanism for repairing surface of lap in lapping machine

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016363A (en) * 1983-07-05 1985-01-28 Koei Sangyo Kk Method and mechanism for repairing surface of lap in lapping machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5989420A (en) * 1994-12-27 1999-11-23 Yuugengaisya Mikazuki Bunkakaikan Porous ceramic filter, method of manufacturing the same, ceramic filter manufacturing extrusion molding die and extrusion molding apparatus using the die

Also Published As

Publication number Publication date
JPH057148B2 (en) 1993-01-28

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