JPS6427772A - Substrate heating device - Google Patents
Substrate heating deviceInfo
- Publication number
- JPS6427772A JPS6427772A JP18297787A JP18297787A JPS6427772A JP S6427772 A JPS6427772 A JP S6427772A JP 18297787 A JP18297787 A JP 18297787A JP 18297787 A JP18297787 A JP 18297787A JP S6427772 A JPS6427772 A JP S6427772A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating
- reflection mirror
- heating device
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To improve heating efficiency and accuracy by providing a pair of reflection mirror bodies having semi-cylindrical mirror face, arranging a colum nar heating body near its focusing point and moving a substrate along the reflection mirror body. CONSTITUTION:The reflection mirror body 13 having a semi-cylindrical mirror face 13a is arranged in opposition on a heating device main body 11 and at the focusing position of its mirror face 13a a circular columnar heating body 14 is provided. A mask 19 is also provided if necessary, about parallel to the substrate 12 of on the substrate holding part 15 of the heating device and the radiant heat component irradiated on the substrate 12 is adjusted by stopping it. The heating and soldering of the substrate 12 are executed by moving along the reflection mirror body 13 near the heating body the substrate 12 together with its holding part 15 by a substrate transfer part 16. Since the heat ray of the heating body 14 is utilized uniformly and efficiently and the adjustment is executed by the mask 19 the heating efficiency and accuracy of the heating device 11 are improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18297787A JPH084933B2 (en) | 1987-07-22 | 1987-07-22 | Substrate heating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18297787A JPH084933B2 (en) | 1987-07-22 | 1987-07-22 | Substrate heating device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6427772A true JPS6427772A (en) | 1989-01-30 |
JPH084933B2 JPH084933B2 (en) | 1996-01-24 |
Family
ID=16127611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18297787A Expired - Fee Related JPH084933B2 (en) | 1987-07-22 | 1987-07-22 | Substrate heating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH084933B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1192906A1 (en) | 2000-09-28 | 2002-04-03 | Nipro Corporation | Intra-arterial shunt tube and method of using same |
CN103071876A (en) * | 2013-01-05 | 2013-05-01 | 烟台睿创微纳技术有限公司 | Package welding method and device |
-
1987
- 1987-07-22 JP JP18297787A patent/JPH084933B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1192906A1 (en) | 2000-09-28 | 2002-04-03 | Nipro Corporation | Intra-arterial shunt tube and method of using same |
CN103071876A (en) * | 2013-01-05 | 2013-05-01 | 烟台睿创微纳技术有限公司 | Package welding method and device |
Also Published As
Publication number | Publication date |
---|---|
JPH084933B2 (en) | 1996-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |