JPS6427619A - Super pure water generator - Google Patents

Super pure water generator

Info

Publication number
JPS6427619A
JPS6427619A JP18334987A JP18334987A JPS6427619A JP S6427619 A JPS6427619 A JP S6427619A JP 18334987 A JP18334987 A JP 18334987A JP 18334987 A JP18334987 A JP 18334987A JP S6427619 A JPS6427619 A JP S6427619A
Authority
JP
Japan
Prior art keywords
pure water
vapor
super pure
module
water generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18334987A
Other languages
Japanese (ja)
Other versions
JPH0761412B2 (en
Inventor
Tsutomu Baba
Koichi Chino
Kiyomi Funabashi
Kazumichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62183349A priority Critical patent/JPH0761412B2/en
Publication of JPS6427619A publication Critical patent/JPS6427619A/en
Publication of JPH0761412B2 publication Critical patent/JPH0761412B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PURPOSE:To improve the purity of super pure water by providing a vapor separation module comprising a non-porous membrane which is in contact with a vapor stream and allows only the gases to be permeated and separated. CONSTITUTION:Pretreated water is introduced into an evaporator 1 by a pump 9 and heated by a heating means 8 to be vaporized. The vapor is then passed through a gas-liquid separator 7 to a membrane module 2. The vapor which has permeated the module is introduced into a condenser 4 together with pure N2 which has been stored in advance to be condensed. The condensed water is stored in a receiving tank 5 as super pure water 6. In this case, non-porous membranes which are permeable only to gases to separate them are used in the membrane module 2.
JP62183349A 1987-07-24 1987-07-24 Ultrapure water production system Expired - Lifetime JPH0761412B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62183349A JPH0761412B2 (en) 1987-07-24 1987-07-24 Ultrapure water production system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62183349A JPH0761412B2 (en) 1987-07-24 1987-07-24 Ultrapure water production system

Publications (2)

Publication Number Publication Date
JPS6427619A true JPS6427619A (en) 1989-01-30
JPH0761412B2 JPH0761412B2 (en) 1995-07-05

Family

ID=16134181

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62183349A Expired - Lifetime JPH0761412B2 (en) 1987-07-24 1987-07-24 Ultrapure water production system

Country Status (1)

Country Link
JP (1) JPH0761412B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537611A (en) * 1991-07-29 1993-02-12 Victor Co Of Japan Ltd Telephone system with number guidance display function
JPH07297899A (en) * 1994-04-22 1995-11-10 Nitsuko Corp Telephone set
GB2305821A (en) * 1995-06-06 1997-04-16 Hitachi Telecomm Tech Telephone terminal and telephone exchange system housing the terminal
JP2009293282A (en) * 2008-06-05 2009-12-17 Tabuchi Corp Multiple meter unit
JP2011214394A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011214393A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011214395A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011231614A (en) * 2011-07-19 2011-11-17 Tabuchi Corp Multiple meter unit
JP2011247085A (en) * 2011-07-19 2011-12-08 Tabuchi Corp Multiple meter unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162003A (en) * 1986-12-25 1988-07-05 Rigunaito Kk Separation of mixed solution

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162003A (en) * 1986-12-25 1988-07-05 Rigunaito Kk Separation of mixed solution

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537611A (en) * 1991-07-29 1993-02-12 Victor Co Of Japan Ltd Telephone system with number guidance display function
JPH07297899A (en) * 1994-04-22 1995-11-10 Nitsuko Corp Telephone set
GB2305821A (en) * 1995-06-06 1997-04-16 Hitachi Telecomm Tech Telephone terminal and telephone exchange system housing the terminal
GB2305821B (en) * 1995-06-06 2000-02-23 Hitachi Telecomm Tech Telephone terminal and telephone exchange system housing the terminal
JP2009293282A (en) * 2008-06-05 2009-12-17 Tabuchi Corp Multiple meter unit
JP2011214394A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011214393A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011214395A (en) * 2011-07-19 2011-10-27 Tabuchi Corp Multiple meter unit
JP2011231614A (en) * 2011-07-19 2011-11-17 Tabuchi Corp Multiple meter unit
JP2011247085A (en) * 2011-07-19 2011-12-08 Tabuchi Corp Multiple meter unit

Also Published As

Publication number Publication date
JPH0761412B2 (en) 1995-07-05

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