JPS6426373U - - Google Patents
Info
- Publication number
- JPS6426373U JPS6426373U JP1987121334U JP12133487U JPS6426373U JP S6426373 U JPS6426373 U JP S6426373U JP 1987121334 U JP1987121334 U JP 1987121334U JP 12133487 U JP12133487 U JP 12133487U JP S6426373 U JPS6426373 U JP S6426373U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- header pipe
- mixing device
- supply pipes
- piping system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 14
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121334U JPH0545382Y2 (it) | 1987-08-07 | 1987-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987121334U JPH0545382Y2 (it) | 1987-08-07 | 1987-08-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6426373U true JPS6426373U (it) | 1989-02-14 |
| JPH0545382Y2 JPH0545382Y2 (it) | 1993-11-19 |
Family
ID=31368246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987121334U Expired - Lifetime JPH0545382Y2 (it) | 1987-08-07 | 1987-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0545382Y2 (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012076083A (ja) * | 2012-01-26 | 2012-04-19 | Miike Iron Works Co Ltd | 微細化混合装置 |
| JP2015143384A (ja) * | 2013-12-27 | 2015-08-06 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法、プログラムおよび記録媒体 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4157040B2 (ja) | 2001-12-03 | 2008-09-24 | 株式会社アルバック | 混合器、薄膜製造装置及び薄膜製造方法 |
-
1987
- 1987-08-07 JP JP1987121334U patent/JPH0545382Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012076083A (ja) * | 2012-01-26 | 2012-04-19 | Miike Iron Works Co Ltd | 微細化混合装置 |
| JP2015143384A (ja) * | 2013-12-27 | 2015-08-06 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法、プログラムおよび記録媒体 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0545382Y2 (it) | 1993-11-19 |