JPS6426367U - - Google Patents
Info
- Publication number
- JPS6426367U JPS6426367U JP11971387U JP11971387U JPS6426367U JP S6426367 U JPS6426367 U JP S6426367U JP 11971387 U JP11971387 U JP 11971387U JP 11971387 U JP11971387 U JP 11971387U JP S6426367 U JPS6426367 U JP S6426367U
- Authority
- JP
- Japan
- Prior art keywords
- winding
- thin film
- chamber
- forming apparatus
- adherend substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004804 winding Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920006255 plastic film Polymers 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971387U JPS6426367U (sv) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11971387U JPS6426367U (sv) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6426367U true JPS6426367U (sv) | 1989-02-14 |
Family
ID=31365183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11971387U Pending JPS6426367U (sv) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6426367U (sv) |
-
1987
- 1987-08-04 JP JP11971387U patent/JPS6426367U/ja active Pending