JPS642593U - - Google Patents

Info

Publication number
JPS642593U
JPS642593U JP9615287U JP9615287U JPS642593U JP S642593 U JPS642593 U JP S642593U JP 9615287 U JP9615287 U JP 9615287U JP 9615287 U JP9615287 U JP 9615287U JP S642593 U JPS642593 U JP S642593U
Authority
JP
Japan
Prior art keywords
electrode
holding device
electrostatic holding
resistor
supply circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9615287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0436235Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987096152U priority Critical patent/JPH0436235Y2/ja
Publication of JPS642593U publication Critical patent/JPS642593U/ja
Application granted granted Critical
Publication of JPH0436235Y2 publication Critical patent/JPH0436235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
JP1987096152U 1987-06-23 1987-06-23 Expired JPH0436235Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987096152U JPH0436235Y2 (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987096152U JPH0436235Y2 (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Publications (2)

Publication Number Publication Date
JPS642593U true JPS642593U (enrdf_load_stackoverflow) 1989-01-09
JPH0436235Y2 JPH0436235Y2 (enrdf_load_stackoverflow) 1992-08-26

Family

ID=31320982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987096152U Expired JPH0436235Y2 (enrdf_load_stackoverflow) 1987-06-23 1987-06-23

Country Status (1)

Country Link
JP (1) JPH0436235Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389339U (enrdf_load_stackoverflow) * 1976-12-23 1978-07-21

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5389339U (enrdf_load_stackoverflow) * 1976-12-23 1978-07-21

Also Published As

Publication number Publication date
JPH0436235Y2 (enrdf_load_stackoverflow) 1992-08-26

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