JPS6425734U - - Google Patents

Info

Publication number
JPS6425734U
JPS6425734U JP11998887U JP11998887U JPS6425734U JP S6425734 U JPS6425734 U JP S6425734U JP 11998887 U JP11998887 U JP 11998887U JP 11998887 U JP11998887 U JP 11998887U JP S6425734 U JPS6425734 U JP S6425734U
Authority
JP
Japan
Prior art keywords
sensor
pressure sensor
piezoresistive pressure
semiconductor piezoresistive
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11998887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11998887U priority Critical patent/JPS6425734U/ja
Publication of JPS6425734U publication Critical patent/JPS6425734U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP11998887U 1987-08-04 1987-08-04 Pending JPS6425734U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11998887U JPS6425734U (US20100223739A1-20100909-C00005.png) 1987-08-04 1987-08-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11998887U JPS6425734U (US20100223739A1-20100909-C00005.png) 1987-08-04 1987-08-04

Publications (1)

Publication Number Publication Date
JPS6425734U true JPS6425734U (US20100223739A1-20100909-C00005.png) 1989-02-13

Family

ID=31365696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11998887U Pending JPS6425734U (US20100223739A1-20100909-C00005.png) 1987-08-04 1987-08-04

Country Status (1)

Country Link
JP (1) JPS6425734U (US20100223739A1-20100909-C00005.png)

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