JPS6425644U - - Google Patents
Info
- Publication number
- JPS6425644U JPS6425644U JP1987120604U JP12060487U JPS6425644U JP S6425644 U JPS6425644 U JP S6425644U JP 1987120604 U JP1987120604 U JP 1987120604U JP 12060487 U JP12060487 U JP 12060487U JP S6425644 U JPS6425644 U JP S6425644U
- Authority
- JP
- Japan
- Prior art keywords
- floor
- clean room
- ceiling
- ceiling chamber
- discharge port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987120604U JPH0336839Y2 (cs) | 1987-08-06 | 1987-08-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987120604U JPH0336839Y2 (cs) | 1987-08-06 | 1987-08-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6425644U true JPS6425644U (cs) | 1989-02-13 |
| JPH0336839Y2 JPH0336839Y2 (cs) | 1991-08-05 |
Family
ID=31366863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987120604U Expired JPH0336839Y2 (cs) | 1987-08-06 | 1987-08-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0336839Y2 (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009001486A1 (ja) * | 2007-06-22 | 2008-12-31 | Shinryo Corporation | クリーンルームの空調方法及び空調装置 |
| CN105546709A (zh) * | 2016-02-04 | 2016-05-04 | 山东格瑞德集团有限公司 | 孔板送风布风系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107031A (ja) * | 1984-10-30 | 1986-05-24 | Taisei Corp | クリ−ンル−ム装置 |
-
1987
- 1987-08-06 JP JP1987120604U patent/JPH0336839Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61107031A (ja) * | 1984-10-30 | 1986-05-24 | Taisei Corp | クリ−ンル−ム装置 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009001486A1 (ja) * | 2007-06-22 | 2008-12-31 | Shinryo Corporation | クリーンルームの空調方法及び空調装置 |
| TWI421457B (zh) * | 2007-06-22 | 2014-01-01 | 新菱冷熱工業股份有限公司 | 潔淨室之空調方法及空調裝置 |
| CN105546709A (zh) * | 2016-02-04 | 2016-05-04 | 山东格瑞德集团有限公司 | 孔板送风布风系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0336839Y2 (cs) | 1991-08-05 |