JPS6424427A - Vacuum treatment equipment - Google Patents

Vacuum treatment equipment

Info

Publication number
JPS6424427A
JPS6424427A JP62180388A JP18038887A JPS6424427A JP S6424427 A JPS6424427 A JP S6424427A JP 62180388 A JP62180388 A JP 62180388A JP 18038887 A JP18038887 A JP 18038887A JP S6424427 A JPS6424427 A JP S6424427A
Authority
JP
Japan
Prior art keywords
pressure
coolant gas
securely
treated
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62180388A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143023B2 (enExample
Inventor
Shigeru Baba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokuda Seisakusho Co Ltd
Original Assignee
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuda Seisakusho Co Ltd filed Critical Tokuda Seisakusho Co Ltd
Priority to JP62180388A priority Critical patent/JPS6424427A/ja
Publication of JPS6424427A publication Critical patent/JPS6424427A/ja
Publication of JPH0143023B2 publication Critical patent/JPH0143023B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
JP62180388A 1987-07-20 1987-07-20 Vacuum treatment equipment Granted JPS6424427A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62180388A JPS6424427A (en) 1987-07-20 1987-07-20 Vacuum treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62180388A JPS6424427A (en) 1987-07-20 1987-07-20 Vacuum treatment equipment

Publications (2)

Publication Number Publication Date
JPS6424427A true JPS6424427A (en) 1989-01-26
JPH0143023B2 JPH0143023B2 (enExample) 1989-09-18

Family

ID=16082360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62180388A Granted JPS6424427A (en) 1987-07-20 1987-07-20 Vacuum treatment equipment

Country Status (1)

Country Link
JP (1) JPS6424427A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102820A (ja) * 1989-09-18 1991-04-30 Tokuda Seisakusho Ltd 真空処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102820A (ja) * 1989-09-18 1991-04-30 Tokuda Seisakusho Ltd 真空処理装置

Also Published As

Publication number Publication date
JPH0143023B2 (enExample) 1989-09-18

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