AU2386288A - Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith - Google Patents
Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewithInfo
- Publication number
- AU2386288A AU2386288A AU23862/88A AU2386288A AU2386288A AU 2386288 A AU2386288 A AU 2386288A AU 23862/88 A AU23862/88 A AU 23862/88A AU 2386288 A AU2386288 A AU 2386288A AU 2386288 A AU2386288 A AU 2386288A
- Authority
- AU
- Australia
- Prior art keywords
- improved
- monitoring
- present
- processes
- use therewith
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/087,409 US4866640A (en) | 1987-08-20 | 1987-08-20 | Temperature compensation for pressure gauge |
US087409 | 1987-08-20 | ||
US16529088A | 1988-03-08 | 1988-03-08 | |
US165290 | 1988-03-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2386288A true AU2386288A (en) | 1989-03-09 |
Family
ID=26776948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU23862/88A Abandoned AU2386288A (en) | 1987-08-20 | 1988-08-22 | Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2386288A (en) |
WO (1) | WO1989001615A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7418869B2 (en) | 2005-06-10 | 2008-09-02 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
US7207224B2 (en) | 2005-06-10 | 2007-04-24 | Brooks Automation, Inc. | Wide-range combination vacuum gauge |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4547859A (en) * | 1981-05-11 | 1985-10-15 | S & W Instruments, Inc. | Methods for scaling and calibrating predetermined signals |
JPS59206737A (en) * | 1983-05-11 | 1984-11-22 | Cosmo Keiki:Kk | Leakage testing device having temperature compensating function |
US4607530A (en) * | 1984-11-01 | 1986-08-26 | Schlumberger Technology Corporation | Temperature compensation for pressure gauges |
US4644482A (en) * | 1984-12-21 | 1987-02-17 | Pressure Systems Incorporated | Digital pressure transducer and corrections circuitry system |
-
1988
- 1988-08-22 WO PCT/US1988/002769 patent/WO1989001615A1/en unknown
- 1988-08-22 AU AU23862/88A patent/AU2386288A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1989001615A1 (en) | 1989-02-23 |
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