AU2386288A - Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith - Google Patents

Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith

Info

Publication number
AU2386288A
AU2386288A AU23862/88A AU2386288A AU2386288A AU 2386288 A AU2386288 A AU 2386288A AU 23862/88 A AU23862/88 A AU 23862/88A AU 2386288 A AU2386288 A AU 2386288A AU 2386288 A AU2386288 A AU 2386288A
Authority
AU
Australia
Prior art keywords
improved
monitoring
present
processes
use therewith
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU23862/88A
Inventor
Charles F. Morrison Jr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Granville Phillips Co
Original Assignee
Granville Phillips Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/087,409 external-priority patent/US4866640A/en
Application filed by Granville Phillips Co filed Critical Granville Phillips Co
Publication of AU2386288A publication Critical patent/AU2386288A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
AU23862/88A 1987-08-20 1988-08-22 Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith Abandoned AU2386288A (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US087409 1987-08-20
US07/087,409 US4866640A (en) 1987-08-20 1987-08-20 Temperature compensation for pressure gauge
US16529088A 1988-03-08 1988-03-08
US165290 1988-03-08

Publications (1)

Publication Number Publication Date
AU2386288A true AU2386288A (en) 1989-03-09

Family

ID=26776948

Family Applications (1)

Application Number Title Priority Date Filing Date
AU23862/88A Abandoned AU2386288A (en) 1987-08-20 1988-08-22 Improved method and apparatus for monitoring and/or controlling gaseous processes including processes where thermal transpiration effects are present and improved gauging for use therewith

Country Status (2)

Country Link
AU (1) AU2386288A (en)
WO (1) WO1989001615A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7207224B2 (en) 2005-06-10 2007-04-24 Brooks Automation, Inc. Wide-range combination vacuum gauge
US7418869B2 (en) 2005-06-10 2008-09-02 Brooks Automation, Inc. Wide-range combination vacuum gauge

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4547859A (en) * 1981-05-11 1985-10-15 S & W Instruments, Inc. Methods for scaling and calibrating predetermined signals
JPS59206737A (en) * 1983-05-11 1984-11-22 Cosmo Keiki:Kk Leakage testing device having temperature compensating function
US4607530A (en) * 1984-11-01 1986-08-26 Schlumberger Technology Corporation Temperature compensation for pressure gauges
US4644482A (en) * 1984-12-21 1987-02-17 Pressure Systems Incorporated Digital pressure transducer and corrections circuitry system

Also Published As

Publication number Publication date
WO1989001615A1 (en) 1989-02-23

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