JPS6424206A - Production of refractive index modulation type grating - Google Patents

Production of refractive index modulation type grating

Info

Publication number
JPS6424206A
JPS6424206A JP18012187A JP18012187A JPS6424206A JP S6424206 A JPS6424206 A JP S6424206A JP 18012187 A JP18012187 A JP 18012187A JP 18012187 A JP18012187 A JP 18012187A JP S6424206 A JPS6424206 A JP S6424206A
Authority
JP
Japan
Prior art keywords
porous glass
refractive index
substrate
parts
glass layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18012187A
Other languages
Japanese (ja)
Inventor
Yoshinobu Mihashi
Satoshi Ishihara
Hiroyoshi Yajima
Naoto Uetsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Hitachi Cable Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP18012187A priority Critical patent/JPS6424206A/en
Publication of JPS6424206A publication Critical patent/JPS6424206A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/124—Geodesic lenses or integrated gratings

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To permit the use of quartz glass for a refractive index modulation type grating by vitrifying porous glass deposited on a substrate by adding a dopant for increasing the refractive index periodically. CONSTITUTION:After forming a porous glass layer 2 on the surface of a quartz substrate 1 and impregnating the porous glass layer 2 with a resist 3 dropped thereon, the porous glass layer 2 is heated. Then, interference fringes are formed on the porous glass layer by generating interference between two fluxes of obliquely irradiated He-Ne laser light 4. Porous glass parts 5 from which uncrosslinked resists 3 are removed with a period of an order of the wavelength of the laser light 4 are prepd. by developing and drying the porous glass layer. When a dopant soln. 7 for increasing the refractive index, such as Ge(OCH3)4 + H2O + CH3OH, etc., is dropped thereon, the soln. is impregnated into the porous glass parts 5, forming porous glass parts 8 contg. GeO2. By heating the porous glass together with the substrate 1 at a specified temp. in O2 atmosphere, the porous glass parts 6 and the porous glass parts 8 contg. GeO2 are transformed to vitreous glass. Thus, a grating 9 having refractive index variable with a period of an order of the wavelength of the laser light is formed on the substrate 1.
JP18012187A 1987-07-21 1987-07-21 Production of refractive index modulation type grating Pending JPS6424206A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18012187A JPS6424206A (en) 1987-07-21 1987-07-21 Production of refractive index modulation type grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18012187A JPS6424206A (en) 1987-07-21 1987-07-21 Production of refractive index modulation type grating

Publications (1)

Publication Number Publication Date
JPS6424206A true JPS6424206A (en) 1989-01-26

Family

ID=16077788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18012187A Pending JPS6424206A (en) 1987-07-21 1987-07-21 Production of refractive index modulation type grating

Country Status (1)

Country Link
JP (1) JPS6424206A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519469A (en) * 1974-07-15 1976-01-26 Sumita Optical Glass Garasuhikari shuseki kairo soshi to sono seizo hoho
JPS56117209A (en) * 1980-02-22 1981-09-14 Sumitomo Electric Ind Ltd Manufacture of optical circuit
JPS6130242A (en) * 1984-07-20 1986-02-12 Masashi Ose Coiling device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519469A (en) * 1974-07-15 1976-01-26 Sumita Optical Glass Garasuhikari shuseki kairo soshi to sono seizo hoho
JPS56117209A (en) * 1980-02-22 1981-09-14 Sumitomo Electric Ind Ltd Manufacture of optical circuit
JPS6130242A (en) * 1984-07-20 1986-02-12 Masashi Ose Coiling device

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