JPS642324A - Centrifugal drying device - Google Patents
Centrifugal drying deviceInfo
- Publication number
- JPS642324A JPS642324A JP15691487A JP15691487A JPS642324A JP S642324 A JPS642324 A JP S642324A JP 15691487 A JP15691487 A JP 15691487A JP 15691487 A JP15691487 A JP 15691487A JP S642324 A JPS642324 A JP S642324A
- Authority
- JP
- Japan
- Prior art keywords
- drying chamber
- bearing part
- gas
- cover
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To prevent the adhesion to a substrate of the particles generated on a bearing part by a method wherein a cover which covers a bearing part is provided in the drying chamber of the bearing part, gas is introduced into the cover, and the inside of the cover is maintained at the pressure higher than that of the drying chamber.
CONSTITUTION: The housing case 2 of semiconductor substrate 1 is revolved by a driving power source 6, the moisture adhered to the substrate 1 is scattered by centrifugal force, and ti is discharged by the air stream 11 flowing from an air inlet 7 to an exhaust pipe 8. A cover 9, with which a bearing part 4 is covered, is provided inside a drying chamber 5, the gas pressure in the cover 9 is maintained higher than that of the outside drying chamber 5 by feeding particle-less gas from a gas piping 10, and a gas stream 12 going to outside the drying chamber 5 through a bearing part 4 is formed. The particles generated by the bearing part are discharged outside from the drying chamber 5 through an exhaust pipe 8 together with a part of the gas fed from the gas piping 10, and the particles can be prevented from adhering to the substrate.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15691487A JPS642324A (en) | 1987-06-24 | 1987-06-24 | Centrifugal drying device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15691487A JPS642324A (en) | 1987-06-24 | 1987-06-24 | Centrifugal drying device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH012324A JPH012324A (en) | 1989-01-06 |
JPS642324A true JPS642324A (en) | 1989-01-06 |
Family
ID=15638138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15691487A Pending JPS642324A (en) | 1987-06-24 | 1987-06-24 | Centrifugal drying device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS642324A (en) |
-
1987
- 1987-06-24 JP JP15691487A patent/JPS642324A/en active Pending
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