JPS6423170A - Positioning mechanism - Google Patents
Positioning mechanismInfo
- Publication number
- JPS6423170A JPS6423170A JP62178736A JP17873687A JPS6423170A JP S6423170 A JPS6423170 A JP S6423170A JP 62178736 A JP62178736 A JP 62178736A JP 17873687 A JP17873687 A JP 17873687A JP S6423170 A JPS6423170 A JP S6423170A
- Authority
- JP
- Japan
- Prior art keywords
- stopper
- movable table
- units
- microswitch
- turned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To remarkably easily position respective units with required accuracy by allowing at least one of units to have a stopper and equipping other units with a driving means, a microswitch, etc. CONSTITUTION:When vertical positioning is performed, a loader part 2 is connected to a probing part 3 and then the driving source 16 of the driving means 15 is turned on to move up or down a movable table 14. When the microswitch 13 contacts the stopper 12 of the probing part 3 during said movement, the switch 13 is turned on to off the driving source 16, thereby stopping the movable table 14 from moving. Consequently, the movable table 14 is positioned vertically at the position held at a reference level determined by the stopper 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62178736A JPH0748074B2 (en) | 1987-07-17 | 1987-07-17 | Probe device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62178736A JPH0748074B2 (en) | 1987-07-17 | 1987-07-17 | Probe device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6423170A true JPS6423170A (en) | 1989-01-25 |
JPH0748074B2 JPH0748074B2 (en) | 1995-05-24 |
Family
ID=16053687
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62178736A Expired - Fee Related JPH0748074B2 (en) | 1987-07-17 | 1987-07-17 | Probe device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0748074B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002248337A (en) * | 2001-02-27 | 2002-09-03 | Foi:Kk | Vacuum equipment |
JP2012066248A (en) * | 2011-12-08 | 2012-04-05 | Lam Research Corp | Vacuum system |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56168566A (en) * | 1980-05-30 | 1981-12-24 | Toshiba Corp | Ic autohandler |
JPS62104131A (en) * | 1985-10-31 | 1987-05-14 | Hitachi Electronics Eng Co Ltd | Wafer measuring device |
-
1987
- 1987-07-17 JP JP62178736A patent/JPH0748074B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56168566A (en) * | 1980-05-30 | 1981-12-24 | Toshiba Corp | Ic autohandler |
JPS62104131A (en) * | 1985-10-31 | 1987-05-14 | Hitachi Electronics Eng Co Ltd | Wafer measuring device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002248337A (en) * | 2001-02-27 | 2002-09-03 | Foi:Kk | Vacuum equipment |
JP2012066248A (en) * | 2011-12-08 | 2012-04-05 | Lam Research Corp | Vacuum system |
Also Published As
Publication number | Publication date |
---|---|
JPH0748074B2 (en) | 1995-05-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |