JPS6423170A - Positioning mechanism - Google Patents

Positioning mechanism

Info

Publication number
JPS6423170A
JPS6423170A JP62178736A JP17873687A JPS6423170A JP S6423170 A JPS6423170 A JP S6423170A JP 62178736 A JP62178736 A JP 62178736A JP 17873687 A JP17873687 A JP 17873687A JP S6423170 A JPS6423170 A JP S6423170A
Authority
JP
Japan
Prior art keywords
stopper
movable table
units
microswitch
turned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62178736A
Other languages
Japanese (ja)
Other versions
JPH0748074B2 (en
Inventor
Taketoshi Itoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62178736A priority Critical patent/JPH0748074B2/en
Publication of JPS6423170A publication Critical patent/JPS6423170A/en
Publication of JPH0748074B2 publication Critical patent/JPH0748074B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To remarkably easily position respective units with required accuracy by allowing at least one of units to have a stopper and equipping other units with a driving means, a microswitch, etc. CONSTITUTION:When vertical positioning is performed, a loader part 2 is connected to a probing part 3 and then the driving source 16 of the driving means 15 is turned on to move up or down a movable table 14. When the microswitch 13 contacts the stopper 12 of the probing part 3 during said movement, the switch 13 is turned on to off the driving source 16, thereby stopping the movable table 14 from moving. Consequently, the movable table 14 is positioned vertically at the position held at a reference level determined by the stopper 12.
JP62178736A 1987-07-17 1987-07-17 Probe device Expired - Fee Related JPH0748074B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62178736A JPH0748074B2 (en) 1987-07-17 1987-07-17 Probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62178736A JPH0748074B2 (en) 1987-07-17 1987-07-17 Probe device

Publications (2)

Publication Number Publication Date
JPS6423170A true JPS6423170A (en) 1989-01-25
JPH0748074B2 JPH0748074B2 (en) 1995-05-24

Family

ID=16053687

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62178736A Expired - Fee Related JPH0748074B2 (en) 1987-07-17 1987-07-17 Probe device

Country Status (1)

Country Link
JP (1) JPH0748074B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002248337A (en) * 2001-02-27 2002-09-03 Foi:Kk Vacuum equipment
JP2012066248A (en) * 2011-12-08 2012-04-05 Lam Research Corp Vacuum system

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168566A (en) * 1980-05-30 1981-12-24 Toshiba Corp Ic autohandler
JPS62104131A (en) * 1985-10-31 1987-05-14 Hitachi Electronics Eng Co Ltd Wafer measuring device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56168566A (en) * 1980-05-30 1981-12-24 Toshiba Corp Ic autohandler
JPS62104131A (en) * 1985-10-31 1987-05-14 Hitachi Electronics Eng Co Ltd Wafer measuring device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002248337A (en) * 2001-02-27 2002-09-03 Foi:Kk Vacuum equipment
JP2012066248A (en) * 2011-12-08 2012-04-05 Lam Research Corp Vacuum system

Also Published As

Publication number Publication date
JPH0748074B2 (en) 1995-05-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees