JPS6423101A - Optical displacement measuring instrument - Google Patents

Optical displacement measuring instrument

Info

Publication number
JPS6423101A
JPS6423101A JP17872287A JP17872287A JPS6423101A JP S6423101 A JPS6423101 A JP S6423101A JP 17872287 A JP17872287 A JP 17872287A JP 17872287 A JP17872287 A JP 17872287A JP S6423101 A JPS6423101 A JP S6423101A
Authority
JP
Japan
Prior art keywords
light
wavelength
omegat
image sensors
mirrors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17872287A
Other languages
English (en)
Inventor
Toshitsugu Ueda
Eiji Ogita
Yoshiaki Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP17872287A priority Critical patent/JPS6423101A/ja
Publication of JPS6423101A publication Critical patent/JPS6423101A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP17872287A 1987-07-17 1987-07-17 Optical displacement measuring instrument Pending JPS6423101A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17872287A JPS6423101A (en) 1987-07-17 1987-07-17 Optical displacement measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17872287A JPS6423101A (en) 1987-07-17 1987-07-17 Optical displacement measuring instrument

Publications (1)

Publication Number Publication Date
JPS6423101A true JPS6423101A (en) 1989-01-25

Family

ID=16053427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17872287A Pending JPS6423101A (en) 1987-07-17 1987-07-17 Optical displacement measuring instrument

Country Status (1)

Country Link
JP (1) JPS6423101A (ja)

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