JPS6422771U - - Google Patents
Info
- Publication number
- JPS6422771U JPS6422771U JP11749287U JP11749287U JPS6422771U JP S6422771 U JPS6422771 U JP S6422771U JP 11749287 U JP11749287 U JP 11749287U JP 11749287 U JP11749287 U JP 11749287U JP S6422771 U JPS6422771 U JP S6422771U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- glow discharge
- film
- decomposition
- electrode plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11749287U JPH06451Y2 (ja) | 1987-07-30 | 1987-07-30 | グロ−放電分解装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11749287U JPH06451Y2 (ja) | 1987-07-30 | 1987-07-30 | グロ−放電分解装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6422771U true JPS6422771U (ru) | 1989-02-06 |
JPH06451Y2 JPH06451Y2 (ja) | 1994-01-05 |
Family
ID=31360997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11749287U Expired - Lifetime JPH06451Y2 (ja) | 1987-07-30 | 1987-07-30 | グロ−放電分解装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06451Y2 (ru) |
-
1987
- 1987-07-30 JP JP11749287U patent/JPH06451Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH06451Y2 (ja) | 1994-01-05 |