JPS6422035U - - Google Patents
Info
- Publication number
- JPS6422035U JPS6422035U JP11771587U JP11771587U JPS6422035U JP S6422035 U JPS6422035 U JP S6422035U JP 11771587 U JP11771587 U JP 11771587U JP 11771587 U JP11771587 U JP 11771587U JP S6422035 U JPS6422035 U JP S6422035U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- opening
- wafers
- stopper means
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11771587U JPS6422035U (en, 2012) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11771587U JPS6422035U (en, 2012) | 1987-07-31 | 1987-07-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422035U true JPS6422035U (en, 2012) | 1989-02-03 |
Family
ID=31361414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11771587U Pending JPS6422035U (en, 2012) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422035U (en, 2012) |
-
1987
- 1987-07-31 JP JP11771587U patent/JPS6422035U/ja active Pending