JPH0180933U - - Google Patents
Info
- Publication number
- JPH0180933U JPH0180933U JP1987177941U JP17794187U JPH0180933U JP H0180933 U JPH0180933 U JP H0180933U JP 1987177941 U JP1987177941 U JP 1987177941U JP 17794187 U JP17794187 U JP 17794187U JP H0180933 U JPH0180933 U JP H0180933U
- Authority
- JP
- Japan
- Prior art keywords
- loading
- wafers
- elevator mechanism
- transfer device
- wafer transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (en, 2012) | 1987-11-20 | 1987-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987177941U JPH0180933U (en, 2012) | 1987-11-20 | 1987-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0180933U true JPH0180933U (en, 2012) | 1989-05-30 |
Family
ID=31469586
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987177941U Pending JPH0180933U (en, 2012) | 1987-11-20 | 1987-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0180933U (en, 2012) |
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1987
- 1987-11-20 JP JP1987177941U patent/JPH0180933U/ja active Pending