JPS6421413U - - Google Patents
Info
- Publication number
- JPS6421413U JPS6421413U JP11637987U JP11637987U JPS6421413U JP S6421413 U JPS6421413 U JP S6421413U JP 11637987 U JP11637987 U JP 11637987U JP 11637987 U JP11637987 U JP 11637987U JP S6421413 U JPS6421413 U JP S6421413U
- Authority
- JP
- Japan
- Prior art keywords
- scavenger
- control device
- exhaust control
- air volume
- volume adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002516 radical scavenger Substances 0.000 claims 6
Landscapes
- Control Of Temperature (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
- Feedback Control In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421413U true JPS6421413U (de) | 1989-02-02 |
| JPH087459Y2 JPH087459Y2 (ja) | 1996-03-04 |
Family
ID=31358862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987116379U Expired - Lifetime JPH087459Y2 (ja) | 1987-07-29 | 1987-07-29 | スカベンジヤの熱排気自動制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087459Y2 (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147253U (de) * | 1976-05-04 | 1977-11-08 | ||
| JPS628633U (de) * | 1985-07-01 | 1987-01-19 | ||
| JPS6266627A (ja) * | 1985-09-19 | 1987-03-26 | Oki Electric Ind Co Ltd | 半導体熱処理装置 |
-
1987
- 1987-07-29 JP JP1987116379U patent/JPH087459Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147253U (de) * | 1976-05-04 | 1977-11-08 | ||
| JPS628633U (de) * | 1985-07-01 | 1987-01-19 | ||
| JPS6266627A (ja) * | 1985-09-19 | 1987-03-26 | Oki Electric Ind Co Ltd | 半導体熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH087459Y2 (ja) | 1996-03-04 |