JPS6421413U - - Google Patents
Info
- Publication number
- JPS6421413U JPS6421413U JP11637987U JP11637987U JPS6421413U JP S6421413 U JPS6421413 U JP S6421413U JP 11637987 U JP11637987 U JP 11637987U JP 11637987 U JP11637987 U JP 11637987U JP S6421413 U JPS6421413 U JP S6421413U
- Authority
- JP
- Japan
- Prior art keywords
- scavenger
- control device
- exhaust control
- air volume
- volume adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002516 radical scavenger Substances 0.000 claims 6
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Feedback Control In General (AREA)
- Control Of Temperature (AREA)
Description
第１図はこの考案の実施例を示す一部断面斜視
図、第２図は第１図の要部拡大図、第３図、第４
図は、夫々他の実施例を示す斜視図で、第２図に
相当する図、第５図は使用状態を示す断面図であ
る。
１０…スカベンジヤ、１１…排気口、１２…ダ
クト風量調整装置、２４…温度センサ。
Figure 1 is a partially sectional perspective view showing an embodiment of this invention, Figure 2 is an enlarged view of the main part of Figure 1, Figures 3 and 4.
The figures are perspective views showing other embodiments, and FIG. 5 is a view corresponding to FIG. 2, and FIG. 5 is a sectional view showing the state of use. 10...Scavengeer, 11...Exhaust port, 12...Duct air volume adjustment device, 24...Temperature sensor.
Claims (1)
を設け、該ダクト風量調整装置を、スカベンジヤ
内に設けた温度センサと接続したことを特徴とす
るスカベンジヤの熱排気自動制御装置。 ２ ダクト風量調整装置が遮断型弁を備えている
ことを特徴とする実用新案登録請求の範囲第１項
記載のスカベンジヤの熱排気自動制御装置。 ３ ダクト風量調整装置が、バタフライ型弁を備
えていることを特徴とする実用新案登録請求の範
囲第１項記載の熱排気自動制御装置。 ４ 温度センサが熱電対温度計であることを特徴
とする実用新案登録請求の範囲第１項記載のスカ
ベンジヤの熱排気自動制御装置。 ５ 温度センサがスカベンジヤの内壁に設けられ
ていることを特徴とする実用新案登録請求の範囲
第１項記載のスカベンジヤの熱排気自動制御装置
。[Claims for Utility Model Registration] 1. An automatic thermal exhaust control device for a scavenger, characterized in that a duct air volume adjustment device is provided at the exhaust port of the scavenger, and the duct air volume adjustment device is connected to a temperature sensor provided inside the scavenger. . 2. The automatic heat exhaust control device for a scavenger according to claim 1, wherein the duct air volume adjustment device is equipped with a shutoff valve. 3. The automatic heat exhaust control device according to claim 1, wherein the duct air volume adjustment device includes a butterfly type valve. 4. The automatic heat exhaust control device for a scavenger according to claim 1, wherein the temperature sensor is a thermocouple thermometer. 5. The automatic heat exhaust control device for a scavenger according to claim 1, wherein the temperature sensor is provided on the inner wall of the scavengeer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (en) | 1987-07-29 | 1987-07-29 | Scavenger heat exhaust automatic control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987116379U JPH087459Y2 (en) | 1987-07-29 | 1987-07-29 | Scavenger heat exhaust automatic control system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421413U true JPS6421413U (en) | 1989-02-02 |
| JPH087459Y2 JPH087459Y2 (en) | 1996-03-04 |
Family
ID=31358862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987116379U Expired - Lifetime JPH087459Y2 (en) | 1987-07-29 | 1987-07-29 | Scavenger heat exhaust automatic control system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH087459Y2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147253U (en) * | 1976-05-04 | 1977-11-08 | ||
| JPS628633U (en) * | 1985-07-01 | 1987-01-19 | ||
| JPS6266627A (en) * | 1985-09-19 | 1987-03-26 | Oki Electric Ind Co Ltd | Semiconductor heat treatment apparatus |
-
1987
- 1987-07-29 JP JP1987116379U patent/JPH087459Y2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52147253U (en) * | 1976-05-04 | 1977-11-08 | ||
| JPS628633U (en) * | 1985-07-01 | 1987-01-19 | ||
| JPS6266627A (en) * | 1985-09-19 | 1987-03-26 | Oki Electric Ind Co Ltd | Semiconductor heat treatment apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH087459Y2 (en) | 1996-03-04 |