JPS6420955A - Extra-precision machine - Google Patents
Extra-precision machineInfo
- Publication number
- JPS6420955A JPS6420955A JP17686087A JP17686087A JPS6420955A JP S6420955 A JPS6420955 A JP S6420955A JP 17686087 A JP17686087 A JP 17686087A JP 17686087 A JP17686087 A JP 17686087A JP S6420955 A JPS6420955 A JP S6420955A
- Authority
- JP
- Japan
- Prior art keywords
- photo
- diode
- center
- laser rays
- support bed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Automatic Control Of Machine Tools (AREA)
- Turning (AREA)
Abstract
PURPOSE:To allow the machining with the precision of sub-micron or less by detecting the movement in the direction rectangular to the table sliding direction of a support bed with a position detecting light receiving element and varying the voltage applied to a piezoelectric element in response to the detection quantity. CONSTITUTION:Laser rays R from the laser 6 are first radiated to the center of a photo-diode 5, and an air slide 1 is driven at 0.33mm/sec. If a support bed 3 is even slightly moved in the Y direction in relation to the air slide 1 at this time, the laser rays R are biased from the original center of the photo-diode 5, light quantities entering the right and left portions of the light receiving section of the photo-diode differ, a current is generated by detecting the difference, and the signal by this current is inputted to a control block 8. The voltage is applied to a piezoelectric element 7 so that the laser rays R are returned to the center of the photo-diode 5, and the applied voltage is made zero when the laser rays are returned to the center. A cutting tool 4 fixed on the support bed 3 is moved in the X direction regardless of the movement of a movable table 2 in the Y direction, and the precision of the machining face is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17686087A JPS6420955A (en) | 1987-07-15 | 1987-07-15 | Extra-precision machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17686087A JPS6420955A (en) | 1987-07-15 | 1987-07-15 | Extra-precision machine |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420955A true JPS6420955A (en) | 1989-01-24 |
Family
ID=16021086
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17686087A Pending JPS6420955A (en) | 1987-07-15 | 1987-07-15 | Extra-precision machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420955A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8272302B2 (en) | 2007-10-30 | 2012-09-25 | Toshiba Kikai Kabushiki Kaisha | Precision roll turning lathe |
-
1987
- 1987-07-15 JP JP17686087A patent/JPS6420955A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8272302B2 (en) | 2007-10-30 | 2012-09-25 | Toshiba Kikai Kabushiki Kaisha | Precision roll turning lathe |
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