JPS6420669U - - Google Patents
Info
- Publication number
- JPS6420669U JPS6420669U JP11614487U JP11614487U JPS6420669U JP S6420669 U JPS6420669 U JP S6420669U JP 11614487 U JP11614487 U JP 11614487U JP 11614487 U JP11614487 U JP 11614487U JP S6420669 U JPS6420669 U JP S6420669U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- mass spectrometer
- inductively coupled
- coupled plasma
- frequency inductively
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 239000010949 copper Substances 0.000 claims 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims 2
- 238000004458 analytical method Methods 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052697 platinum Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
第1図は本考案実施例の要部構成説明図、第2
図は高周波誘導結合プラズマ質量分析計の全体的
な構成説明図である。
1……プラズマトーチ、6……ノズル、6a…
…ノズルボデイ、6b……チツプ、7……スキマ
、10′……バルブ、18,19……フオアチヤ
ンバーのボデイ、20a,20b……水冷管、2
1a,21b,22a,22b……ネジ。
Figure 1 is an explanatory diagram of the main part configuration of the embodiment of the present invention, Figure 2
The figure is an explanatory diagram of the overall configuration of a high frequency inductively coupled plasma mass spectrometer. 1... Plasma torch, 6... Nozzle, 6a...
... Nozzle body, 6b... Chip, 7... Clearance, 10'... Valve, 18, 19... Foot chamber body, 20a, 20b... Water cooling pipe, 2
1a, 21b, 22a, 22b...screws.
Claims (1)
起させ生じたイオンをノズルとスキマーからなる
インターフエイスを介して質量分析計に導いて前
記試料中の被測定元素を分析する分析計において
、前記ノズルを該ノズルの先端部を形成するチツ
プと該チツプが一側に接合された熱伝導性の良い
ノズルボデイとで構成すると共に、該ボデイの他
側を固着したフオアチヤンバーボデイに水冷管を
埋設したことを特徴とする高周波誘導結合プラズ
マ質量分析計。 (2) 前記チツプはニツケル、セラミツク、白金
、若しくは銅のいずれかの材料でなる実用新案登
録請求範囲第(1)項記載の高周波誘導結合プラズ
マ質量分析計。 (3) 前記ノズルボデイは銅材料でなる実用新案
登録請求範囲第(1)項記載の高周波誘導結合プラ
ズマ質量分析計。[Claims for Utility Model Registration] (1) The ions generated by exciting a sample using high-frequency inductively coupled plasma are guided to a mass spectrometer through an interface consisting of a nozzle and a skimmer to detect the element to be measured in the sample. In the analyzer for analysis, the nozzle is composed of a chip forming the tip of the nozzle, a nozzle body with good thermal conductivity to which the chip is bonded to one side, and a face chain fixed to the other side of the body. A high-frequency inductively coupled plasma mass spectrometer featuring a water-cooled tube embedded in the bar body. (2) The high-frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the chip is made of any one of nickel, ceramic, platinum, or copper. (3) The high frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the nozzle body is made of a copper material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11614487U JPH0542611Y2 (en) | 1987-07-29 | 1987-07-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11614487U JPH0542611Y2 (en) | 1987-07-29 | 1987-07-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6420669U true JPS6420669U (en) | 1989-02-01 |
JPH0542611Y2 JPH0542611Y2 (en) | 1993-10-27 |
Family
ID=31358413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11614487U Expired - Lifetime JPH0542611Y2 (en) | 1987-07-29 | 1987-07-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0542611Y2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1125903A (en) * | 1997-07-04 | 1999-01-29 | Agency Of Ind Science & Technol | Metal-ceramic composite smpler and skimmer |
JP2015502023A (en) * | 2011-12-12 | 2015-01-19 | サーモ フィッシャー サイエンティフィック (ブレーメン) ゲーエムベーハー | Vacuum interface method and vacuum interface device for mass spectrometer |
-
1987
- 1987-07-29 JP JP11614487U patent/JPH0542611Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1125903A (en) * | 1997-07-04 | 1999-01-29 | Agency Of Ind Science & Technol | Metal-ceramic composite smpler and skimmer |
JP2015502023A (en) * | 2011-12-12 | 2015-01-19 | サーモ フィッシャー サイエンティフィック (ブレーメン) ゲーエムベーハー | Vacuum interface method and vacuum interface device for mass spectrometer |
Also Published As
Publication number | Publication date |
---|---|
JPH0542611Y2 (en) | 1993-10-27 |
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