JPS6420669U - - Google Patents

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Publication number
JPS6420669U
JPS6420669U JP11614487U JP11614487U JPS6420669U JP S6420669 U JPS6420669 U JP S6420669U JP 11614487 U JP11614487 U JP 11614487U JP 11614487 U JP11614487 U JP 11614487U JP S6420669 U JPS6420669 U JP S6420669U
Authority
JP
Japan
Prior art keywords
nozzle
mass spectrometer
inductively coupled
coupled plasma
frequency inductively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11614487U
Other languages
Japanese (ja)
Other versions
JPH0542611Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11614487U priority Critical patent/JPH0542611Y2/ja
Publication of JPS6420669U publication Critical patent/JPS6420669U/ja
Application granted granted Critical
Publication of JPH0542611Y2 publication Critical patent/JPH0542611Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案実施例の要部構成説明図、第2
図は高周波誘導結合プラズマ質量分析計の全体的
な構成説明図である。 1……プラズマトーチ、6……ノズル、6a…
…ノズルボデイ、6b……チツプ、7……スキマ
、10′……バルブ、18,19……フオアチヤ
ンバーのボデイ、20a,20b……水冷管、2
1a,21b,22a,22b……ネジ。
Figure 1 is an explanatory diagram of the main part configuration of the embodiment of the present invention, Figure 2
The figure is an explanatory diagram of the overall configuration of a high frequency inductively coupled plasma mass spectrometer. 1... Plasma torch, 6... Nozzle, 6a...
... Nozzle body, 6b... Chip, 7... Clearance, 10'... Valve, 18, 19... Foot chamber body, 20a, 20b... Water cooling pipe, 2
1a, 21b, 22a, 22b...screws.

Claims (1)

【実用新案登録請求の範囲】 (1) 高周波誘導結合プラズマを用いて試料を励
起させ生じたイオンをノズルとスキマーからなる
インターフエイスを介して質量分析計に導いて前
記試料中の被測定元素を分析する分析計において
、前記ノズルを該ノズルの先端部を形成するチツ
プと該チツプが一側に接合された熱伝導性の良い
ノズルボデイとで構成すると共に、該ボデイの他
側を固着したフオアチヤンバーボデイに水冷管を
埋設したことを特徴とする高周波誘導結合プラズ
マ質量分析計。 (2) 前記チツプはニツケル、セラミツク、白金
、若しくは銅のいずれかの材料でなる実用新案登
録請求範囲第(1)項記載の高周波誘導結合プラズ
マ質量分析計。 (3) 前記ノズルボデイは銅材料でなる実用新案
登録請求範囲第(1)項記載の高周波誘導結合プラ
ズマ質量分析計。
[Claims for Utility Model Registration] (1) The ions generated by exciting a sample using high-frequency inductively coupled plasma are guided to a mass spectrometer through an interface consisting of a nozzle and a skimmer to detect the element to be measured in the sample. In the analyzer for analysis, the nozzle is composed of a chip forming the tip of the nozzle, a nozzle body with good thermal conductivity to which the chip is bonded to one side, and a face chain fixed to the other side of the body. A high-frequency inductively coupled plasma mass spectrometer featuring a water-cooled tube embedded in the bar body. (2) The high-frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the chip is made of any one of nickel, ceramic, platinum, or copper. (3) The high frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the nozzle body is made of a copper material.
JP11614487U 1987-07-29 1987-07-29 Expired - Lifetime JPH0542611Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11614487U JPH0542611Y2 (en) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11614487U JPH0542611Y2 (en) 1987-07-29 1987-07-29

Publications (2)

Publication Number Publication Date
JPS6420669U true JPS6420669U (en) 1989-02-01
JPH0542611Y2 JPH0542611Y2 (en) 1993-10-27

Family

ID=31358413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11614487U Expired - Lifetime JPH0542611Y2 (en) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPH0542611Y2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (en) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol Metal-ceramic composite smpler and skimmer
JP2015502023A (en) * 2011-12-12 2015-01-19 サーモ フィッシャー サイエンティフィック (ブレーメン) ゲーエムベーハー Vacuum interface method and vacuum interface device for mass spectrometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1125903A (en) * 1997-07-04 1999-01-29 Agency Of Ind Science & Technol Metal-ceramic composite smpler and skimmer
JP2015502023A (en) * 2011-12-12 2015-01-19 サーモ フィッシャー サイエンティフィック (ブレーメン) ゲーエムベーハー Vacuum interface method and vacuum interface device for mass spectrometer

Also Published As

Publication number Publication date
JPH0542611Y2 (en) 1993-10-27

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