JPH0319248U - - Google Patents
Info
- Publication number
- JPH0319248U JPH0319248U JP11453188U JP11453188U JPH0319248U JP H0319248 U JPH0319248 U JP H0319248U JP 11453188 U JP11453188 U JP 11453188U JP 11453188 U JP11453188 U JP 11453188U JP H0319248 U JPH0319248 U JP H0319248U
- Authority
- JP
- Japan
- Prior art keywords
- inductively coupled
- coupled plasma
- frequency inductively
- mass spectrometer
- plasma mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009616 inductively coupled plasma Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 1
- 238000004458 analytical method Methods 0.000 claims 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000008018 melting Effects 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 229910052750 molybdenum Inorganic materials 0.000 claims 1
- 239000011733 molybdenum Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案実施例の要部構成説明図、第２
図は高周波誘導結合プラズマ質量分析計の全体的
な構成説明図である。
１……プラズマトーチ、６……ノズル、６ａ…
…ノズルボデイ、６ｂ……熱伝導抑止部、６ｃ…
…ノズル先端部、７……スキマ、１０′……バル
ブ、１８，１９……フオアチヤンバーのボデイ、
２０ａ，２０ｂ……水冷管、２１ａ，２１ｂ，２
２ａ，２２ｂ……ネジ。
Figure 1 is an explanatory diagram of the main part configuration of the embodiment of the present invention, Figure 2
The figure is an explanatory diagram of the overall configuration of a high-frequency inductively coupled plasma mass spectrometer. 1... Plasma torch, 6... Nozzle, 6a...
...Nozzle body, 6b...Heat conduction suppressing part, 6c...
...Nozzle tip, 7... Clearance, 10'... Valve, 18, 19... Body of foot chamber,
20a, 20b...water cooling pipe, 21a, 21b, 2
2a, 22b...screws.
Claims (1)
起させ生じたイオンをノズルとスキマーからなる
インターフエイスを介して質量分析計に導いて前
記試料中の被測定元素を分析する高周波誘導結合
プラズマ質量分析計において、ノズルボデイの一
方の側を水冷管が埋設されたフオアチヤンバーボ
デイに固着して水冷部を構成すると共に、該ノズ
ルボデイの他方の側に接合され高融点金属材料で
なる先端部と前記冷却部の間に熱伝導抑止部を設
けたことを特徴とする高周波誘導結合プラズマ質
量分析形。 (2) 前記高融点金属材料は、タングステン、モ
リブデン、若しくはタンタルのいずれかの材料で
なる実用新案登録請求範囲第(1)項記載の高周波
誘導結合プラズマ質量分析計。[Claims for Utility Model Registration] (1) The ions generated by exciting a sample using high-frequency inductively coupled plasma are guided to a mass spectrometer through an interface consisting of a nozzle and a skimmer to detect the element to be measured in the sample. In a high-frequency inductively coupled plasma mass spectrometer for analysis, one side of the nozzle body is fixed to a face chamber body in which a water-cooled tube is embedded to form a water-cooled part, and a high-melting point metal is bonded to the other side of the nozzle body. A high frequency inductively coupled plasma mass spectrometry type, characterized in that a heat conduction suppressing part is provided between the tip part made of a material and the cooling part. (2) The high-frequency inductively coupled plasma mass spectrometer according to claim 1, wherein the high melting point metal material is any one of tungsten, molybdenum, or tantalum.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11453188U JPH0542613Y2 (en) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11453188U JPH0542613Y2 (en) | 1988-08-31 | 1988-08-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0319248U true JPH0319248U (en) | 1991-02-26 |
| JPH0542613Y2 JPH0542613Y2 (en) | 1993-10-27 |
Family
ID=31662892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11453188U Expired - Lifetime JPH0542613Y2 (en) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0542613Y2 (en) |
-
1988
- 1988-08-31 JP JP11453188U patent/JPH0542613Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0542613Y2 (en) | 1993-10-27 |
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