JPS6419668A - Ion implanter - Google Patents

Ion implanter

Info

Publication number
JPS6419668A
JPS6419668A JP62173897A JP17389787A JPS6419668A JP S6419668 A JPS6419668 A JP S6419668A JP 62173897 A JP62173897 A JP 62173897A JP 17389787 A JP17389787 A JP 17389787A JP S6419668 A JPS6419668 A JP S6419668A
Authority
JP
Japan
Prior art keywords
work
transfer device
held
work holder
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62173897A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053107B2 (enrdf_load_stackoverflow
Inventor
Taizo Hoshino
Aiji Shirou
Yukio Nakamori
Yuzo Sakurada
Motoyoshi Furusawa
Kazuhiro Kashimoto
Takenobu Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Ulvac Inc
Original Assignee
Nippon Steel Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Ulvac Inc filed Critical Nippon Steel Corp
Priority to JP62173897A priority Critical patent/JPS6419668A/ja
Publication of JPS6419668A publication Critical patent/JPS6419668A/ja
Publication of JPH053107B2 publication Critical patent/JPH053107B2/ja
Granted legal-status Critical Current

Links

JP62173897A 1987-07-14 1987-07-14 Ion implanter Granted JPS6419668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62173897A JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Publications (2)

Publication Number Publication Date
JPS6419668A true JPS6419668A (en) 1989-01-23
JPH053107B2 JPH053107B2 (enrdf_load_stackoverflow) 1993-01-14

Family

ID=15969114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62173897A Granted JPS6419668A (en) 1987-07-14 1987-07-14 Ion implanter

Country Status (1)

Country Link
JP (1) JPS6419668A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1016863A4 (en) * 1997-09-19 2001-10-17 Japan Science & Tech Corp HIGH VACUUM XAFS MEASURING INSTRUMENT

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5795396A (en) * 1989-03-31 1998-08-18 Canon Kabushiki Kaisha Apparatus for forming crystalline film
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器

Also Published As

Publication number Publication date
JPH053107B2 (enrdf_load_stackoverflow) 1993-01-14

Similar Documents

Publication Publication Date Title
CA2052080A1 (en) Plasma source arrangement for ion implantation
JPS6419668A (en) Ion implanter
AU6230990A (en) Microwave spectrometer
DE3564965D1 (en) Method and vacuum furnace for heat treatment a charge
JPS5723727A (en) High frequency heater device with heating unit
JPS5552112A (en) Temperature control unit for electronic unit
Korshunov et al. The Anomalously Accelerated Diffusion of Sulphur in Implanted p-InSb
KR0150819B1 (ko) 초단파를 이용한 냉장고용 김치숙성장치
JPS6417864A (en) Ion implantation equipment
JPS5756109A (en) Descaing method for hot strip
ES2028472T3 (es) Deflector para la proteccion termica automatica de los mandos del panel frontal de un horno domestico.
JPS55128736A (en) Cooking unit
JPS52156299A (en) High temperature ion irradiating device
US3892520A (en) Annealing oven for thermoluminescence dosimeter
JPS6466539A (en) Cold heat cycle apparatus
Kawasoko et al. Apparatus for Annealing Strip Coils
MY118514A (en) Process and heating device for melting semiconductor material
JPS57104030A (en) Heating cooker
LETA Quantitative secondary ion mass spectrometric analysis using ion implantation[Ph. D. Thesis]
Babd-Zakhryapin Creep of a Molybdenum Single Crystal Irradiated With Low-Energy Ions
JPS57157952A (en) Method of keeping bathtub warm and apparatus therefor
KR950007485B1 (ko) 반도체 제조장치
JPS56155318A (en) Cooking device
JPS5485799A (en) Automatic vending machine
GB1518723A (en) Apparatus for disinfection of hydrophilic contact lenses