JPS6419666A - Time series surface measuring method by surface analyzer - Google Patents
Time series surface measuring method by surface analyzerInfo
- Publication number
- JPS6419666A JPS6419666A JP62175231A JP17523187A JPS6419666A JP S6419666 A JPS6419666 A JP S6419666A JP 62175231 A JP62175231 A JP 62175231A JP 17523187 A JP17523187 A JP 17523187A JP S6419666 A JPS6419666 A JP S6419666A
- Authority
- JP
- Japan
- Prior art keywords
- proton
- beams
- sought
- pulses
- position detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 abstract 2
- 239000006185 dispersion Substances 0.000 abstract 1
- 239000013307 optical fiber Substances 0.000 abstract 1
- 238000004611 spectroscopical analysis Methods 0.000 abstract 1
- 238000001228 spectrum Methods 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To make it possible to measure changes in the surface of a sample along the lapse of time precisely by executing proton beam irradiation and dispersion by a pulse method. CONSTITUTION:Dispersed proton beams are injected to a position detector 7 and output from the position detector 7 is input into a high-speed arithmetic circuit 41. And an energy space is divided into some spheres and count number is sought from each sphere and this result is stored in a memory 42. This is sent to a data analyzer 46 located outside a PELS(Proton Energy Loss Spectroscopy) apparatus by an optical transmitter 43, an optical fiber 44 and an optical receiver 45. That is, the proton beams are made into pulses and the dispersed beams are obtained as pulses and an energy spectrum is sought from each pulse. Hereby, it becomes possible to examine changes in the surface condition of a sample by the time resulution of several musec.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62175231A JPS6419666A (en) | 1987-07-14 | 1987-07-14 | Time series surface measuring method by surface analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62175231A JPS6419666A (en) | 1987-07-14 | 1987-07-14 | Time series surface measuring method by surface analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419666A true JPS6419666A (en) | 1989-01-23 |
Family
ID=15992560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62175231A Pending JPS6419666A (en) | 1987-07-14 | 1987-07-14 | Time series surface measuring method by surface analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419666A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4842848A (en) * | 1985-07-11 | 1989-06-27 | Sumitomo Chemical Company, Limited | Make-up cosmetics |
| US5482610A (en) * | 1991-11-14 | 1996-01-09 | Leybold Aktiengesellschaft | Cathode for coating a substrate |
-
1987
- 1987-07-14 JP JP62175231A patent/JPS6419666A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4842848A (en) * | 1985-07-11 | 1989-06-27 | Sumitomo Chemical Company, Limited | Make-up cosmetics |
| US5482610A (en) * | 1991-11-14 | 1996-01-09 | Leybold Aktiengesellschaft | Cathode for coating a substrate |
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