JPS6419657A - Manufacture of electron emitting element - Google Patents

Manufacture of electron emitting element

Info

Publication number
JPS6419657A
JPS6419657A JP17483987A JP17483987A JPS6419657A JP S6419657 A JPS6419657 A JP S6419657A JP 17483987 A JP17483987 A JP 17483987A JP 17483987 A JP17483987 A JP 17483987A JP S6419657 A JPS6419657 A JP S6419657A
Authority
JP
Japan
Prior art keywords
electron emitting
film
emitting material
laser
emitting part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17483987A
Other languages
Japanese (ja)
Other versions
JP2614047B2 (en
Inventor
Yoshikazu Sakano
Tetsuya Kaneko
Seishiro Yoshioka
Ichiro Nomura
Toshihiko Takeda
Hidetoshi Suzuki
Kojiro Yokono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP17483987A priority Critical patent/JP2614047B2/en
Publication of JPS6419657A publication Critical patent/JPS6419657A/en
Application granted granted Critical
Publication of JP2614047B2 publication Critical patent/JP2614047B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/316—Cold cathodes, e.g. field-emissive cathode having an electric field parallel to the surface, e.g. thin film cathodes

Abstract

PURPOSE:To make it possible to form an electron emitting part in a desired position with the degree of change uniform and reproducibility excellent by partially heating the electron emitting part of a film made of electron emitting material provided between electrodes which oppose each other and changing the film of the electron emitting material by performing heat treatment through current application for the film. CONSTITUTION:A formed element is heated among the air or inside a vacuum vessel by partially irradiating infrared ray lasers and semiconductor laser such as CO2 laser, glass laser, etc. or infrared light 16, whose wave lengths are about 1-10mum to, a desired position to form an electron emitting part 15 on the film 13 made of electron emitting material. At the same time, the film of electron emitting material is heated by applying power required for formation by the current application heat treatment so as to break, deform or transmute only that part, and the electron emitting part 15 is formed in the film of the electron emitting material by the shift of a laser or a board. Hereby, the change degree in the film of the electron emitting material can be uniformed and the electron emitting part can be formed uniform without unevenness between elements and excellent in reproducibility.
JP17483987A 1987-07-15 1987-07-15 Method for manufacturing electron-emitting device Expired - Fee Related JP2614047B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17483987A JP2614047B2 (en) 1987-07-15 1987-07-15 Method for manufacturing electron-emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17483987A JP2614047B2 (en) 1987-07-15 1987-07-15 Method for manufacturing electron-emitting device

Publications (2)

Publication Number Publication Date
JPS6419657A true JPS6419657A (en) 1989-01-23
JP2614047B2 JP2614047B2 (en) 1997-05-28

Family

ID=15985556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17483987A Expired - Fee Related JP2614047B2 (en) 1987-07-15 1987-07-15 Method for manufacturing electron-emitting device

Country Status (1)

Country Link
JP (1) JP2614047B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334803B1 (en) 1996-04-26 2002-01-01 Canon Kabushiki Kaisha Method of manufacturing electron-emitting device, electron source and image-forming apparatus using the same
US6900581B2 (en) 1999-02-22 2005-05-31 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6334803B1 (en) 1996-04-26 2002-01-01 Canon Kabushiki Kaisha Method of manufacturing electron-emitting device, electron source and image-forming apparatus using the same
US6366015B1 (en) 1996-04-26 2002-04-02 Canon Kabushiki Kaisha Method of manufacturing electron-emitting device, electron source and image-forming apparatus using the same
US6900581B2 (en) 1999-02-22 2005-05-31 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof
US7067336B1 (en) 1999-02-22 2006-06-27 Canon Kabushiki Kaisha Electron-emitting device, electron source and image-forming apparatus, and manufacturing methods thereof

Also Published As

Publication number Publication date
JP2614047B2 (en) 1997-05-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees