JPS6419250U - - Google Patents

Info

Publication number
JPS6419250U
JPS6419250U JP11344087U JP11344087U JPS6419250U JP S6419250 U JPS6419250 U JP S6419250U JP 11344087 U JP11344087 U JP 11344087U JP 11344087 U JP11344087 U JP 11344087U JP S6419250 U JPS6419250 U JP S6419250U
Authority
JP
Japan
Prior art keywords
proton beam
slit
light
collimator
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11344087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0727554Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987113440U priority Critical patent/JPH0727554Y2/ja
Publication of JPS6419250U publication Critical patent/JPS6419250U/ja
Application granted granted Critical
Publication of JPH0727554Y2 publication Critical patent/JPH0727554Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1987113440U 1987-07-24 1987-07-24 表面解析装置 Expired - Lifetime JPH0727554Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987113440U JPH0727554Y2 (ja) 1987-07-24 1987-07-24 表面解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987113440U JPH0727554Y2 (ja) 1987-07-24 1987-07-24 表面解析装置

Publications (2)

Publication Number Publication Date
JPS6419250U true JPS6419250U (US06826419-20041130-M00005.png) 1989-01-31
JPH0727554Y2 JPH0727554Y2 (ja) 1995-06-21

Family

ID=31353277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987113440U Expired - Lifetime JPH0727554Y2 (ja) 1987-07-24 1987-07-24 表面解析装置

Country Status (1)

Country Link
JP (1) JPH0727554Y2 (US06826419-20041130-M00005.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5490288U (US06826419-20041130-M00005.png) * 1977-12-07 1979-06-26
JPS61151958A (ja) * 1984-12-25 1986-07-10 Univ Nagoya 表面解析装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5490288U (US06826419-20041130-M00005.png) * 1977-12-07 1979-06-26
JPS61151958A (ja) * 1984-12-25 1986-07-10 Univ Nagoya 表面解析装置

Also Published As

Publication number Publication date
JPH0727554Y2 (ja) 1995-06-21

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