JPS6418726U - - Google Patents
Info
- Publication number
- JPS6418726U JPS6418726U JP11320587U JP11320587U JPS6418726U JP S6418726 U JPS6418726 U JP S6418726U JP 11320587 U JP11320587 U JP 11320587U JP 11320587 U JP11320587 U JP 11320587U JP S6418726 U JPS6418726 U JP S6418726U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support rods
- grooveless
- semicircle
- grooves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113205U JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987113205U JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418726U true JPS6418726U (pt) | 1989-01-30 |
| JPH0648825Y2 JPH0648825Y2 (ja) | 1994-12-12 |
Family
ID=31352832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987113205U Expired - Lifetime JPH0648825Y2 (ja) | 1987-07-23 | 1987-07-23 | 成長装置用ウエハキャリア |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648825Y2 (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447023U (pt) * | 1990-08-28 | 1992-04-21 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164867A (en) * | 1974-12-03 | 1976-06-04 | Tokyo Shibaura Electric Co | Handotaisochino seizosochi |
-
1987
- 1987-07-23 JP JP1987113205U patent/JPH0648825Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5164867A (en) * | 1974-12-03 | 1976-06-04 | Tokyo Shibaura Electric Co | Handotaisochino seizosochi |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0447023U (pt) * | 1990-08-28 | 1992-04-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648825Y2 (ja) | 1994-12-12 |