JPS6418628U - - Google Patents

Info

Publication number
JPS6418628U
JPS6418628U JP11193287U JP11193287U JPS6418628U JP S6418628 U JPS6418628 U JP S6418628U JP 11193287 U JP11193287 U JP 11193287U JP 11193287 U JP11193287 U JP 11193287U JP S6418628 U JPS6418628 U JP S6418628U
Authority
JP
Japan
Prior art keywords
bearing
bearings
dust
rotating shaft
magnetic fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11193287U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11193287U priority Critical patent/JPS6418628U/ja
Publication of JPS6418628U publication Critical patent/JPS6418628U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の実施例の要部の断面図、第２
図は他の実施例の断面図である。 １……回転軸、２……軸受、３，３……磁性流
体シール。 Figure 1 is a sectional view of the main parts of the embodiment of the present invention, Figure 2
The figure is a sectional view of another embodiment. 1... Rotating shaft, 2... Bearing, 3, 3... Magnetic fluid seal.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空処理装置内に設けた回転軸を、ベアリング
その他の軸受により支承するようにしたものに於
て、該軸受の軸方向の両側に該軸受から発生する
ダストを封じ込める磁性流体シールを設けたこと
を特徴とするダストフリー軸受装置。 In vacuum processing equipment in which the rotating shaft is supported by bearings or other bearings, magnetic fluid seals are provided on both sides of the bearing in the axial direction to contain dust generated from the bearing. Features a dust-free bearing device.
JP11193287U 1987-07-23 1987-07-23 Pending JPS6418628U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11193287U JPS6418628U (en) 1987-07-23 1987-07-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11193287U JPS6418628U (en) 1987-07-23 1987-07-23

Publications (1)

Publication Number Publication Date
JPS6418628U true JPS6418628U (en) 1989-01-30

Family

ID=31350416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11193287U Pending JPS6418628U (en) 1987-07-23 1987-07-23

Country Status (1)

Country Link
JP (1) JPS6418628U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236971A (en) * 1985-04-15 1986-10-22 Nippon Telegr & Teleph Corp <Ntt> Sealing method for magnetic fluid seal

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236971A (en) * 1985-04-15 1986-10-22 Nippon Telegr & Teleph Corp <Ntt> Sealing method for magnetic fluid seal

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