JPS5880138U - Rotary vacuum chuck device - Google Patents
Rotary vacuum chuck deviceInfo
- Publication number
- JPS5880138U JPS5880138U JP17469281U JP17469281U JPS5880138U JP S5880138 U JPS5880138 U JP S5880138U JP 17469281 U JP17469281 U JP 17469281U JP 17469281 U JP17469281 U JP 17469281U JP S5880138 U JPS5880138 U JP S5880138U
- Authority
- JP
- Japan
- Prior art keywords
- pressure reduction
- shaft
- base body
- side pressure
- labyrinth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Jigs For Machine Tools (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例の要部断面正面図である。
１・・・・・・基体、２・・・・・・貫通孔、３・・・
・・・軸受体（ボールベアリング）、５・・・・・・回
転軸、９・・・・・・吸着面、１１・・・・・・駆動体
、１２・・・・・・ラビリンス軸封体、１３・・・・・
・環状溝、１６・・・・・・軸側減圧路、１７・・・・
・・基体側減圧路、１８・・・・・・第１減圧路、２０
・・・・・・第２減圧路。The figure is a sectional front view of essential parts of an embodiment of the present invention. 1...Base body, 2...Through hole, 3...
... Bearing body (ball bearing), 5 ... Rotating shaft, 9 ... Adsorption surface, 11 ... Drive body, 12 ... Labyrinth shaft seal Body, 13...
・Annular groove, 16... Shaft side pressure reducing path, 17...
...Base side pressure reduction path, 18...First pressure reduction path, 20
...Second pressure reduction path.
Claims (1)
設けられた一対の軸受体と、これら軸受体により回転自
在に支持されかつ一端面を吸着面とした回転軸と、この
回転軸を回転駆動する駆動体と、上記軸受体の間に設け
られて上記回転軸の外周面または上記貫通孔の内周面に
形成された複数個の環状溝をもったラビリンス軸封体と
、上記回転軸に設けられ一端が上記吸着面に開口し他端
が上記ラビリンス軸封体に開口した軸側減圧路および上
記基体に設けられ一端が減圧源に連通し他端が上記ラビ
リンス軸封体に開口して上記軸側減圧路に上記ラビリン
ス軸封体を介して連通ずる基体側減圧路からなる第１減
圧路と、上記基体側減圧路および上記一対の軸受体の間
にそれぞれ設けられて各一端部が上記ラビリンス軸封体
に開口し各他端部が上記減圧源に連通した第２減圧路と
を具備したことを特徴とする回転真空チャック装置。A base body having a through hole, a pair of bearing bodies provided in the base body coaxially with the through hole, a rotating shaft rotatably supported by these bearing bodies and having one end surface as a suction surface, and this rotating shaft. a labyrinth shaft sealing body provided between the bearing body and having a plurality of annular grooves formed on the outer peripheral surface of the rotating shaft or the inner peripheral surface of the through hole; A shaft-side pressure reduction path provided on the rotating shaft and having one end opened to the suction surface and the other end opened to the labyrinth shaft seal; and a shaft side pressure reduction path provided in the base body, one end communicating with the decompression source and the other end opening to the labyrinth shaft seal. a first pressure reduction path consisting of a base body side pressure reduction passage that opens and communicates with the shaft side pressure reduction passage via the labyrinth shaft seal; and a first pressure reduction passage provided between the base body side pressure reduction passage and the pair of bearing bodies, respectively; A rotary vacuum chuck device comprising: a second pressure reduction path having one end open to the labyrinth shaft seal and each other end communicating with the pressure reduction source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17469281U JPS5928745Y2 (en) | 1981-11-26 | 1981-11-26 | Rotating vacuum chuck device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17469281U JPS5928745Y2 (en) | 1981-11-26 | 1981-11-26 | Rotating vacuum chuck device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5880138U true JPS5880138U (en) | 1983-05-31 |
| JPS5928745Y2 JPS5928745Y2 (en) | 1984-08-18 |
Family
ID=29966759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17469281U Expired JPS5928745Y2 (en) | 1981-11-26 | 1981-11-26 | Rotating vacuum chuck device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928745Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62238634A (en) * | 1986-04-10 | 1987-10-19 | Hitachi Electronics Eng Co Ltd | Surface inspecting apparatus |
-
1981
- 1981-11-26 JP JP17469281U patent/JPS5928745Y2/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62238634A (en) * | 1986-04-10 | 1987-10-19 | Hitachi Electronics Eng Co Ltd | Surface inspecting apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5928745Y2 (en) | 1984-08-18 |
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