JPS6418606A - Manufacture of semi-conductor wafer - Google Patents

Manufacture of semi-conductor wafer

Info

Publication number
JPS6418606A
JPS6418606A JP17571587A JP17571587A JPS6418606A JP S6418606 A JPS6418606 A JP S6418606A JP 17571587 A JP17571587 A JP 17571587A JP 17571587 A JP17571587 A JP 17571587A JP S6418606 A JPS6418606 A JP S6418606A
Authority
JP
Japan
Prior art keywords
wafer
adsorption
time
component
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17571587A
Other languages
English (en)
Other versions
JPH056488B2 (ja
Inventor
Kazunori Kizaki
Masaharu Ninomiya
Tetsujirou Yoshiharu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUSHU ELECTRON METAL
KYUSHU ELECTRON METAL CO Ltd
Osaka Titanium Co Ltd
Original Assignee
KYUSHU ELECTRON METAL
KYUSHU ELECTRON METAL CO Ltd
Osaka Titanium Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUSHU ELECTRON METAL, KYUSHU ELECTRON METAL CO Ltd, Osaka Titanium Co Ltd filed Critical KYUSHU ELECTRON METAL
Priority to JP17571587A priority Critical patent/JPS6418606A/ja
Publication of JPS6418606A publication Critical patent/JPS6418606A/ja
Publication of JPH056488B2 publication Critical patent/JPH056488B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
    • B28D5/028—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a ring blade having an inside cutting edge

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP17571587A 1987-07-14 1987-07-14 Manufacture of semi-conductor wafer Granted JPS6418606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17571587A JPS6418606A (en) 1987-07-14 1987-07-14 Manufacture of semi-conductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17571587A JPS6418606A (en) 1987-07-14 1987-07-14 Manufacture of semi-conductor wafer

Publications (2)

Publication Number Publication Date
JPS6418606A true JPS6418606A (en) 1989-01-23
JPH056488B2 JPH056488B2 (ja) 1993-01-26

Family

ID=16000972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17571587A Granted JPS6418606A (en) 1987-07-14 1987-07-14 Manufacture of semi-conductor wafer

Country Status (1)

Country Link
JP (1) JPS6418606A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332805A (ja) * 1989-06-29 1991-02-13 Tokyo Seimitsu Co Ltd スライシングマシンの誤差補正方法
US8074130B2 (en) 2007-02-16 2011-12-06 Advantest Corporation Test apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502281A (ja) * 1973-05-16 1975-01-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502281A (ja) * 1973-05-16 1975-01-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0332805A (ja) * 1989-06-29 1991-02-13 Tokyo Seimitsu Co Ltd スライシングマシンの誤差補正方法
US8074130B2 (en) 2007-02-16 2011-12-06 Advantest Corporation Test apparatus

Also Published As

Publication number Publication date
JPH056488B2 (ja) 1993-01-26

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees