JPS6418149U - - Google Patents
Info
- Publication number
- JPS6418149U JPS6418149U JP10996287U JP10996287U JPS6418149U JP S6418149 U JPS6418149 U JP S6418149U JP 10996287 U JP10996287 U JP 10996287U JP 10996287 U JP10996287 U JP 10996287U JP S6418149 U JPS6418149 U JP S6418149U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- strip
- devices
- sealing device
- seals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10996287U JPS6418149U (enExample) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10996287U JPS6418149U (enExample) | 1987-07-20 | 1987-07-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6418149U true JPS6418149U (enExample) | 1989-01-30 |
Family
ID=31346685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10996287U Pending JPS6418149U (enExample) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6418149U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011104861A1 (ja) * | 2010-02-26 | 2011-09-01 | 入江工研株式会社 | ゲートバルブのシール構造 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS624866A (ja) * | 1985-06-29 | 1987-01-10 | Ishikawajima Harima Heavy Ind Co Ltd | 真空処理装置のシ−ル装置 |
-
1987
- 1987-07-20 JP JP10996287U patent/JPS6418149U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS624866A (ja) * | 1985-06-29 | 1987-01-10 | Ishikawajima Harima Heavy Ind Co Ltd | 真空処理装置のシ−ル装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011104861A1 (ja) * | 2010-02-26 | 2011-09-01 | 入江工研株式会社 | ゲートバルブのシール構造 |