JPS6417864A - Ion implantation equipment - Google Patents

Ion implantation equipment

Info

Publication number
JPS6417864A
JPS6417864A JP17390087A JP17390087A JPS6417864A JP S6417864 A JPS6417864 A JP S6417864A JP 17390087 A JP17390087 A JP 17390087A JP 17390087 A JP17390087 A JP 17390087A JP S6417864 A JPS6417864 A JP S6417864A
Authority
JP
Japan
Prior art keywords
work
holder
load lock
ion implantation
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17390087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0380870B2 (enrdf_load_stackoverflow
Inventor
Taizo Hoshino
Aiji Shirou
Yukio Nakamori
Noboru Uzawa
Hideaki Kamioka
Takenobu Fuda
Yuzo Sakurada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Ulvac Inc
Original Assignee
Nippon Steel Corp
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp, Ulvac Inc filed Critical Nippon Steel Corp
Priority to JP17390087A priority Critical patent/JPS6417864A/ja
Publication of JPS6417864A publication Critical patent/JPS6417864A/ja
Publication of JPH0380870B2 publication Critical patent/JPH0380870B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP17390087A 1987-07-14 1987-07-14 Ion implantation equipment Granted JPS6417864A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17390087A JPS6417864A (en) 1987-07-14 1987-07-14 Ion implantation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17390087A JPS6417864A (en) 1987-07-14 1987-07-14 Ion implantation equipment

Publications (2)

Publication Number Publication Date
JPS6417864A true JPS6417864A (en) 1989-01-20
JPH0380870B2 JPH0380870B2 (enrdf_load_stackoverflow) 1991-12-26

Family

ID=15969167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17390087A Granted JPS6417864A (en) 1987-07-14 1987-07-14 Ion implantation equipment

Country Status (1)

Country Link
JP (1) JPS6417864A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022224717A1 (ja) 2021-04-19 2022-10-27 国立研究開発法人物質・材料研究機構 軟質眼用レンズ及びその製造方法

Also Published As

Publication number Publication date
JPH0380870B2 (enrdf_load_stackoverflow) 1991-12-26

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