JPS6417460U - - Google Patents
Info
- Publication number
- JPS6417460U JPS6417460U JP11166087U JP11166087U JPS6417460U JP S6417460 U JPS6417460 U JP S6417460U JP 11166087 U JP11166087 U JP 11166087U JP 11166087 U JP11166087 U JP 11166087U JP S6417460 U JPS6417460 U JP S6417460U
- Authority
- JP
- Japan
- Prior art keywords
- alumina substrate
- oxygen sensor
- electrodes
- titania layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 150000002926 oxygen Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (ko) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (ko) | 1987-07-21 | 1987-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6417460U true JPS6417460U (ko) | 1989-01-27 |
| JPH0521010Y2 JPH0521010Y2 (ko) | 1993-05-31 |
Family
ID=31349904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11166087U Expired - Lifetime JPH0521010Y2 (ko) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521010Y2 (ko) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09304321A (ja) * | 1996-05-20 | 1997-11-28 | Denso Corp | セラミック積層体及びその製造方法 |
| JP2007101477A (ja) * | 2005-10-07 | 2007-04-19 | Fuji Electric Fa Components & Systems Co Ltd | 薄膜ガスセンサ |
| JP2008209390A (ja) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | ガスセンサ |
| WO2009078370A1 (ja) * | 2007-12-14 | 2009-06-25 | Ngk Spark Plug Co., Ltd. | ガスセンサ |
| JP2009150885A (ja) * | 2007-12-20 | 2009-07-09 | General Electric Co <Ge> | ガスセンサー及び製法 |
-
1987
- 1987-07-21 JP JP11166087U patent/JPH0521010Y2/ja not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09304321A (ja) * | 1996-05-20 | 1997-11-28 | Denso Corp | セラミック積層体及びその製造方法 |
| JP2007101477A (ja) * | 2005-10-07 | 2007-04-19 | Fuji Electric Fa Components & Systems Co Ltd | 薄膜ガスセンサ |
| JP2008209390A (ja) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | ガスセンサ |
| WO2009078370A1 (ja) * | 2007-12-14 | 2009-06-25 | Ngk Spark Plug Co., Ltd. | ガスセンサ |
| US8393196B2 (en) | 2007-12-14 | 2013-03-12 | Ngk Spark Plug Co., Ltd. | Gas sensor |
| JP5161210B2 (ja) * | 2007-12-14 | 2013-03-13 | 日本特殊陶業株式会社 | ガスセンサ |
| JP2009150885A (ja) * | 2007-12-20 | 2009-07-09 | General Electric Co <Ge> | ガスセンサー及び製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521010Y2 (ko) | 1993-05-31 |