JPS6416933A - Weight detector - Google Patents

Abstract

PURPOSE:To improve accuracy, etc., by providing a thin film spacer which has specific thickness and is so shaped not to contact as sensor pressure sensing part between a sensor and a sensor mount part. CONSTITUTION:When a load is placed on a diaphragm 7 through a load transmission means 2, only the diaphragm 7 flexes until two upper and lower electrodes 5 contact each other, but a substrate 8 also continues to flex after the contacting until it contacts the sensor mount part 20. The load is received thereafter by the mount part 20 as a rigid body, so neither the diaphragm 7 nor the substrate 8 beaks by flexing abnormality. In this case, the diaphragm 7 and substrate 8 must not exceed the elasticity limits owing to the stress caused by the flexing. The quantity of the flexing is determined by the film thickness of a thin-film spacer 21. Here, aluminum foil of about 15mum is used as the spacer 21 to measure only the load from the body to be measured extremely accurately without applying any pressure from the side of the substrate 8 at the time of weight measurement.