JPS6416638U - - Google Patents
Info
- Publication number
- JPS6416638U JPS6416638U JP11176087U JP11176087U JPS6416638U JP S6416638 U JPS6416638 U JP S6416638U JP 11176087 U JP11176087 U JP 11176087U JP 11176087 U JP11176087 U JP 11176087U JP S6416638 U JPS6416638 U JP S6416638U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- flat
- probe
- location
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111760U JPH0528767Y2 (sr) | 1987-07-20 | 1987-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987111760U JPH0528767Y2 (sr) | 1987-07-20 | 1987-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6416638U true JPS6416638U (sr) | 1989-01-27 |
| JPH0528767Y2 JPH0528767Y2 (sr) | 1993-07-23 |
Family
ID=31350094
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987111760U Expired - Lifetime JPH0528767Y2 (sr) | 1987-07-20 | 1987-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528767Y2 (sr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721831A (en) * | 1980-07-14 | 1982-02-04 | Nec Kyushu Ltd | Inspecting device for semiconductor wafer |
-
1987
- 1987-07-20 JP JP1987111760U patent/JPH0528767Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721831A (en) * | 1980-07-14 | 1982-02-04 | Nec Kyushu Ltd | Inspecting device for semiconductor wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528767Y2 (sr) | 1993-07-23 |